8/6/2012	10:53:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2012	10:53:08 AM	Recipe started at 10:53 AM
8/6/2012	10:53:08 AM	Helium valve closed
8/6/2012	10:53:08 AM	H2 valve closed
8/6/2012	10:53:08 AM	BCl3 valve closed
8/6/2012	10:53:08 AM	PH3 valve closed
8/6/2012	10:53:08 AM	SiCl4 pre valve closed
8/6/2012	10:53:08 AM	SiCl4 post valve closed
8/6/2012	10:53:08 AM	Main Vac valve closed
8/6/2012	10:53:08 AM	Bypass valve closed
8/6/2012	10:53:08 AM	Bubbler valve closed
8/6/2012	10:53:08 AM	Helium MFC set to  0.000000
8/6/2012	10:53:08 AM	H2 MFC set to  0.000000
8/6/2012	10:53:08 AM	BCl3 MFC set to  0.000000
8/6/2012	10:53:08 AM	PH3 MFC set to  0.000000
8/6/2012	10:53:08 AM	SiCl4 MFC set to  0.000000
8/6/2012	10:53:08 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	10:53:08 AM	Tube furnace set to 0
8/6/2012	10:53:11 AM	H2 valve closed
8/6/2012	10:53:11 AM	BCl3 valve closed
8/6/2012	10:53:11 AM	PH3 valve closed
8/6/2012	10:53:11 AM	SiCl4 pre valve closed
8/6/2012	10:53:11 AM	SiCl4 post valve closed
8/6/2012	10:53:11 AM	Main Vac valve closed
8/6/2012	10:53:11 AM	Bypass valve closed
8/6/2012	10:53:11 AM	Bubbler valve closed
8/6/2012	10:53:11 AM	Helium valve opened
8/6/2012	10:53:11 AM	Helium MFC set to  500.000000
8/6/2012	10:53:11 AM	H2 MFC set to  0.000000
8/6/2012	10:53:11 AM	BCl3 MFC set to  0.000000
8/6/2012	10:53:11 AM	PH3 MFC set to  0.000000
8/6/2012	10:53:11 AM	SiCl4 MFC set to  0.000000
8/6/2012	10:53:11 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	10:53:11 AM	Tube furnace set to 0
8/6/2012	10:54:23 AM	Helium valve closed
8/6/2012	10:54:23 AM	H2 valve closed
8/6/2012	10:54:23 AM	BCl3 valve closed
8/6/2012	10:54:23 AM	PH3 valve closed
8/6/2012	10:54:23 AM	SiCl4 pre valve closed
8/6/2012	10:54:23 AM	SiCl4 post valve closed
8/6/2012	10:54:23 AM	Main Vac valve closed
8/6/2012	10:54:23 AM	Bypass valve closed
8/6/2012	10:54:24 AM	Bubbler valve closed
8/6/2012	10:54:24 AM	Helium MFC set to  0.000000
8/6/2012	10:54:24 AM	H2 MFC set to  0.000000
8/6/2012	10:54:24 AM	BCl3 MFC set to  0.000000
8/6/2012	10:54:24 AM	PH3 MFC set to  0.000000
8/6/2012	10:54:24 AM	SiCl4 MFC set to  0.000000
8/6/2012	10:54:24 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	10:54:24 AM	Tube furnace set to 0
8/6/2012	10:54:25 AM	Run finished at 10:54 AM
8/6/2012	10:54:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2012	10:56:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2012	10:56:17 AM	Recipe started at 10:56 AM
8/6/2012	10:56:17 AM	Helium valve closed
8/6/2012	10:56:17 AM	H2 valve closed
8/6/2012	10:56:17 AM	BCl3 valve closed
8/6/2012	10:56:17 AM	PH3 valve closed
8/6/2012	10:56:17 AM	SiCl4 pre valve closed
8/6/2012	10:56:17 AM	SiCl4 post valve closed
8/6/2012	10:56:17 AM	Main Vac valve closed
8/6/2012	10:56:17 AM	Bubbler valve closed
8/6/2012	10:56:17 AM	Bypass valve opened
8/6/2012	10:56:17 AM	Helium MFC set to  0.000000
8/6/2012	10:56:17 AM	H2 MFC set to  0.000000
8/6/2012	10:56:17 AM	BCl3 MFC set to  0.000000
8/6/2012	10:56:17 AM	PH3 MFC set to  0.000000
8/6/2012	10:56:17 AM	SiCl4 MFC set to  0.000000
8/6/2012	10:56:17 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	10:56:17 AM	Tube furnace set to 0
8/6/2012	10:57:26 AM	Helium valve closed
8/6/2012	10:57:26 AM	H2 valve closed
8/6/2012	10:57:26 AM	BCl3 valve closed
8/6/2012	10:57:26 AM	PH3 valve closed
8/6/2012	10:57:26 AM	SiCl4 pre valve closed
8/6/2012	10:57:26 AM	SiCl4 post valve closed
8/6/2012	10:57:26 AM	Main Vac valve closed
8/6/2012	10:57:26 AM	Bubbler valve closed
8/6/2012	10:57:26 AM	Bypass valve opened
8/6/2012	10:57:26 AM	Helium MFC set to  0.000000
8/6/2012	10:57:26 AM	H2 MFC set to  0.000000
8/6/2012	10:57:26 AM	BCl3 MFC set to  0.000000
8/6/2012	10:57:26 AM	PH3 MFC set to  0.000000
8/6/2012	10:57:26 AM	SiCl4 MFC set to  0.000000
8/6/2012	10:57:26 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	10:57:26 AM	Tube furnace set to 0
8/6/2012	10:58:26 AM	Helium valve closed
8/6/2012	10:58:26 AM	H2 valve closed
8/6/2012	10:58:26 AM	BCl3 valve closed
8/6/2012	10:58:26 AM	PH3 valve closed
8/6/2012	10:58:26 AM	SiCl4 pre valve closed
8/6/2012	10:58:26 AM	SiCl4 post valve closed
8/6/2012	10:58:26 AM	Bypass valve closed
8/6/2012	10:58:26 AM	Bubbler valve closed
8/6/2012	10:58:26 AM	Main Vac valve opened
8/6/2012	10:58:26 AM	Helium MFC set to  0.000000
8/6/2012	10:58:26 AM	H2 MFC set to  0.000000
8/6/2012	10:58:26 AM	BCl3 MFC set to  0.000000
8/6/2012	10:58:26 AM	PH3 MFC set to  0.000000
8/6/2012	10:58:26 AM	SiCl4 MFC set to  0.000000
8/6/2012	10:58:26 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	10:58:26 AM	Tube furnace set to 0
8/6/2012	10:58:27 AM	Run finished at 10:58 AM
8/6/2012	10:58:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2012	10:59:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2012	10:59:27 AM	Recipe started at 10:59 AM
8/6/2012	10:59:27 AM	Helium valve closed
8/6/2012	10:59:27 AM	H2 valve closed
8/6/2012	10:59:27 AM	BCl3 valve closed
8/6/2012	10:59:27 AM	PH3 valve closed
8/6/2012	10:59:27 AM	SiCl4 pre valve closed
8/6/2012	10:59:27 AM	SiCl4 post valve closed
8/6/2012	10:59:27 AM	Main Vac valve closed
8/6/2012	10:59:27 AM	Bypass valve closed
8/6/2012	10:59:27 AM	Bubbler valve closed
8/6/2012	10:59:27 AM	Helium MFC set to  0.000000
8/6/2012	10:59:27 AM	H2 MFC set to  0.000000
8/6/2012	10:59:27 AM	BCl3 MFC set to  0.000000
8/6/2012	10:59:27 AM	PH3 MFC set to  0.000000
8/6/2012	10:59:27 AM	SiCl4 MFC set to  0.000000
8/6/2012	10:59:27 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	10:59:28 AM	Tube furnace set to 0
8/6/2012	10:59:31 AM	H2 valve closed
8/6/2012	10:59:31 AM	BCl3 valve closed
8/6/2012	10:59:31 AM	PH3 valve closed
8/6/2012	10:59:31 AM	SiCl4 pre valve closed
8/6/2012	10:59:31 AM	SiCl4 post valve closed
8/6/2012	10:59:31 AM	Main Vac valve closed
8/6/2012	10:59:31 AM	Bypass valve closed
8/6/2012	10:59:31 AM	Bubbler valve closed
8/6/2012	10:59:31 AM	Helium valve opened
8/6/2012	10:59:31 AM	Helium MFC set to  500.000000
8/6/2012	10:59:31 AM	H2 MFC set to  0.000000
8/6/2012	10:59:31 AM	BCl3 MFC set to  0.000000
8/6/2012	10:59:31 AM	PH3 MFC set to  0.000000
8/6/2012	10:59:31 AM	SiCl4 MFC set to  0.000000
8/6/2012	10:59:31 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	10:59:31 AM	Tube furnace set to 0
8/6/2012	11:00:45 AM	Helium valve closed
8/6/2012	11:00:45 AM	H2 valve closed
8/6/2012	11:00:45 AM	BCl3 valve closed
8/6/2012	11:00:45 AM	PH3 valve closed
8/6/2012	11:00:45 AM	SiCl4 pre valve closed
8/6/2012	11:00:45 AM	SiCl4 post valve closed
8/6/2012	11:00:45 AM	Main Vac valve closed
8/6/2012	11:00:45 AM	Bypass valve closed
8/6/2012	11:00:45 AM	Bubbler valve closed
8/6/2012	11:00:45 AM	Helium MFC set to  0.000000
8/6/2012	11:00:45 AM	H2 MFC set to  0.000000
8/6/2012	11:00:45 AM	BCl3 MFC set to  0.000000
8/6/2012	11:00:45 AM	PH3 MFC set to  0.000000
8/6/2012	11:00:45 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:00:45 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:00:45 AM	Tube furnace set to 0
8/6/2012	11:00:46 AM	Run finished at 11:00 AM
8/6/2012	11:00:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2012	11:04:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2012	11:04:44 AM	Recipe started at 11:04 AM
8/6/2012	11:04:44 AM	Helium valve closed
8/6/2012	11:04:44 AM	H2 valve closed
8/6/2012	11:04:44 AM	BCl3 valve closed
8/6/2012	11:04:44 AM	PH3 valve closed
8/6/2012	11:04:44 AM	SiCl4 pre valve closed
8/6/2012	11:04:44 AM	SiCl4 post valve closed
8/6/2012	11:04:44 AM	Main Vac valve closed
8/6/2012	11:04:44 AM	Bubbler valve closed
8/6/2012	11:04:44 AM	Bypass valve opened
8/6/2012	11:04:44 AM	Helium MFC set to  0.000000
8/6/2012	11:04:44 AM	H2 MFC set to  0.000000
8/6/2012	11:04:44 AM	BCl3 MFC set to  0.000000
8/6/2012	11:04:44 AM	PH3 MFC set to  0.000000
8/6/2012	11:04:44 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:04:44 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:04:44 AM	Tube furnace set to 0
8/6/2012	11:06:02 AM	Helium valve closed
8/6/2012	11:06:02 AM	H2 valve closed
8/6/2012	11:06:02 AM	BCl3 valve closed
8/6/2012	11:06:02 AM	PH3 valve closed
8/6/2012	11:06:02 AM	SiCl4 pre valve closed
8/6/2012	11:06:02 AM	SiCl4 post valve closed
8/6/2012	11:06:02 AM	Main Vac valve closed
8/6/2012	11:06:02 AM	Bubbler valve closed
8/6/2012	11:06:02 AM	Bypass valve opened
8/6/2012	11:06:02 AM	Helium MFC set to  0.000000
8/6/2012	11:06:02 AM	H2 MFC set to  0.000000
8/6/2012	11:06:02 AM	BCl3 MFC set to  0.000000
8/6/2012	11:06:02 AM	PH3 MFC set to  0.000000
8/6/2012	11:06:02 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:06:02 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:06:02 AM	Tube furnace set to 0
8/6/2012	11:07:02 AM	Helium valve closed
8/6/2012	11:07:02 AM	H2 valve closed
8/6/2012	11:07:02 AM	BCl3 valve closed
8/6/2012	11:07:02 AM	PH3 valve closed
8/6/2012	11:07:02 AM	SiCl4 pre valve closed
8/6/2012	11:07:02 AM	SiCl4 post valve closed
8/6/2012	11:07:02 AM	Bypass valve closed
8/6/2012	11:07:02 AM	Bubbler valve closed
8/6/2012	11:07:02 AM	Main Vac valve opened
8/6/2012	11:07:02 AM	Helium MFC set to  0.000000
8/6/2012	11:07:02 AM	H2 MFC set to  0.000000
8/6/2012	11:07:02 AM	BCl3 MFC set to  0.000000
8/6/2012	11:07:02 AM	PH3 MFC set to  0.000000
8/6/2012	11:07:02 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:07:02 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:07:02 AM	Tube furnace set to 0
8/6/2012	11:07:03 AM	Run finished at 11:07 AM
8/6/2012	11:07:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2012	11:33:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/6/2012	11:33:53 AM	Recipe started at 11:33 AM
8/6/2012	11:33:53 AM	Helium valve closed
8/6/2012	11:33:53 AM	H2 valve closed
8/6/2012	11:33:53 AM	BCl3 valve closed
8/6/2012	11:33:53 AM	PH3 valve closed
8/6/2012	11:33:53 AM	SiCl4 pre valve closed
8/6/2012	11:33:53 AM	SiCl4 post valve closed
8/6/2012	11:33:53 AM	Main Vac valve closed
8/6/2012	11:33:53 AM	Bubbler valve closed
8/6/2012	11:33:53 AM	Bypass valve opened
8/6/2012	11:33:53 AM	Helium MFC set to  0.000000
8/6/2012	11:33:53 AM	H2 MFC set to  0.000000
8/6/2012	11:33:53 AM	BCl3 MFC set to  0.000000
8/6/2012	11:33:53 AM	PH3 MFC set to  0.000000
8/6/2012	11:33:53 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:33:53 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:33:53 AM	Tube furnace set to 0
8/6/2012	11:33:53 AM	Helium valve closed
8/6/2012	11:33:53 AM	H2 valve closed
8/6/2012	11:33:53 AM	BCl3 valve closed
8/6/2012	11:33:53 AM	PH3 valve closed
8/6/2012	11:33:53 AM	SiCl4 pre valve closed
8/6/2012	11:33:53 AM	SiCl4 post valve closed
8/6/2012	11:33:53 AM	Main Vac valve closed
8/6/2012	11:33:53 AM	Bubbler valve closed
8/6/2012	11:33:53 AM	Bypass valve opened
8/6/2012	11:33:53 AM	Helium MFC set to  0.000000
8/6/2012	11:33:53 AM	H2 MFC set to  0.000000
8/6/2012	11:33:53 AM	BCl3 MFC set to  0.000000
8/6/2012	11:33:53 AM	PH3 MFC set to  0.000000
8/6/2012	11:33:53 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:33:53 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:33:53 AM	Tube furnace set to 0
8/6/2012	11:34:23 AM	Helium valve closed
8/6/2012	11:34:23 AM	H2 valve closed
8/6/2012	11:34:23 AM	BCl3 valve closed
8/6/2012	11:34:23 AM	PH3 valve closed
8/6/2012	11:34:23 AM	SiCl4 pre valve closed
8/6/2012	11:34:23 AM	SiCl4 post valve closed
8/6/2012	11:34:23 AM	Bypass valve closed
8/6/2012	11:34:23 AM	Bubbler valve closed
8/6/2012	11:34:23 AM	Main Vac valve opened
8/6/2012	11:34:23 AM	Helium MFC set to  0.000000
8/6/2012	11:34:23 AM	H2 MFC set to  0.000000
8/6/2012	11:34:23 AM	BCl3 MFC set to  0.000000
8/6/2012	11:34:23 AM	PH3 MFC set to  0.000000
8/6/2012	11:34:23 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:34:23 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:34:24 AM	Tube furnace set to 0
8/6/2012	11:34:54 AM	H2 valve closed
8/6/2012	11:34:54 AM	BCl3 valve closed
8/6/2012	11:34:54 AM	PH3 valve closed
8/6/2012	11:34:54 AM	SiCl4 pre valve closed
8/6/2012	11:34:54 AM	SiCl4 post valve closed
8/6/2012	11:34:54 AM	Bypass valve closed
8/6/2012	11:34:54 AM	Bubbler valve closed
8/6/2012	11:34:54 AM	Helium valve opened
8/6/2012	11:34:54 AM	Main Vac valve opened
8/6/2012	11:34:54 AM	Helium MFC set to  20.000000
8/6/2012	11:34:54 AM	H2 MFC set to  0.000000
8/6/2012	11:34:54 AM	BCl3 MFC set to  0.000000
8/6/2012	11:34:54 AM	PH3 MFC set to  0.000000
8/6/2012	11:34:54 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:34:54 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:34:54 AM	Tube furnace set to 0
8/6/2012	11:35:24 AM	Helium valve closed
8/6/2012	11:35:24 AM	H2 valve closed
8/6/2012	11:35:24 AM	BCl3 valve closed
8/6/2012	11:35:24 AM	PH3 valve closed
8/6/2012	11:35:24 AM	SiCl4 pre valve closed
8/6/2012	11:35:24 AM	SiCl4 post valve closed
8/6/2012	11:35:24 AM	Bypass valve closed
8/6/2012	11:35:24 AM	Bubbler valve closed
8/6/2012	11:35:24 AM	Main Vac valve opened
8/6/2012	11:35:24 AM	Helium MFC set to  0.000000
8/6/2012	11:35:24 AM	H2 MFC set to  0.000000
8/6/2012	11:35:24 AM	BCl3 MFC set to  0.000000
8/6/2012	11:35:24 AM	PH3 MFC set to  0.000000
8/6/2012	11:35:24 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:35:24 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:35:24 AM	Tube furnace set to 0
8/6/2012	11:35:54 AM	H2 valve closed
8/6/2012	11:35:54 AM	BCl3 valve closed
8/6/2012	11:35:54 AM	PH3 valve closed
8/6/2012	11:35:54 AM	SiCl4 pre valve closed
8/6/2012	11:35:54 AM	SiCl4 post valve closed
8/6/2012	11:35:54 AM	Bypass valve closed
8/6/2012	11:35:54 AM	Bubbler valve closed
8/6/2012	11:35:54 AM	Helium valve opened
8/6/2012	11:35:54 AM	Main Vac valve opened
8/6/2012	11:35:54 AM	Helium MFC set to  20.000000
8/6/2012	11:35:54 AM	H2 MFC set to  0.000000
8/6/2012	11:35:54 AM	BCl3 MFC set to  0.000000
8/6/2012	11:35:54 AM	PH3 MFC set to  0.000000
8/6/2012	11:35:54 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:35:54 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:35:54 AM	Tube furnace set to 0
8/6/2012	11:36:24 AM	Helium valve closed
8/6/2012	11:36:24 AM	H2 valve closed
8/6/2012	11:36:24 AM	BCl3 valve closed
8/6/2012	11:36:24 AM	PH3 valve closed
8/6/2012	11:36:24 AM	SiCl4 pre valve closed
8/6/2012	11:36:24 AM	SiCl4 post valve closed
8/6/2012	11:36:24 AM	Bypass valve closed
8/6/2012	11:36:24 AM	Bubbler valve closed
8/6/2012	11:36:24 AM	Main Vac valve opened
8/6/2012	11:36:24 AM	Helium MFC set to  0.000000
8/6/2012	11:36:24 AM	H2 MFC set to  0.000000
8/6/2012	11:36:24 AM	BCl3 MFC set to  0.000000
8/6/2012	11:36:24 AM	PH3 MFC set to  0.000000
8/6/2012	11:36:24 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:36:24 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:36:25 AM	Tube furnace set to 0
8/6/2012	11:36:55 AM	H2 valve closed
8/6/2012	11:36:55 AM	BCl3 valve closed
8/6/2012	11:36:55 AM	PH3 valve closed
8/6/2012	11:36:55 AM	SiCl4 pre valve closed
8/6/2012	11:36:55 AM	SiCl4 post valve closed
8/6/2012	11:36:55 AM	Bypass valve closed
8/6/2012	11:36:55 AM	Bubbler valve closed
8/6/2012	11:36:55 AM	Helium valve opened
8/6/2012	11:36:55 AM	Main Vac valve opened
8/6/2012	11:36:55 AM	Helium MFC set to  20.000000
8/6/2012	11:36:55 AM	H2 MFC set to  0.000000
8/6/2012	11:36:55 AM	BCl3 MFC set to  0.000000
8/6/2012	11:36:55 AM	PH3 MFC set to  0.000000
8/6/2012	11:36:55 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:36:55 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:36:55 AM	Tube furnace set to 0
8/6/2012	11:37:25 AM	Helium valve closed
8/6/2012	11:37:25 AM	H2 valve closed
8/6/2012	11:37:25 AM	BCl3 valve closed
8/6/2012	11:37:25 AM	PH3 valve closed
8/6/2012	11:37:25 AM	SiCl4 pre valve closed
8/6/2012	11:37:25 AM	SiCl4 post valve closed
8/6/2012	11:37:25 AM	Bypass valve closed
8/6/2012	11:37:25 AM	Bubbler valve closed
8/6/2012	11:37:25 AM	Main Vac valve opened
8/6/2012	11:37:25 AM	Helium MFC set to  0.000000
8/6/2012	11:37:25 AM	H2 MFC set to  0.000000
8/6/2012	11:37:25 AM	BCl3 MFC set to  0.000000
8/6/2012	11:37:25 AM	PH3 MFC set to  0.000000
8/6/2012	11:37:25 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:37:25 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:37:25 AM	Tube furnace set to 0
8/6/2012	11:37:55 AM	H2 valve closed
8/6/2012	11:37:55 AM	BCl3 valve closed
8/6/2012	11:37:55 AM	PH3 valve closed
8/6/2012	11:37:55 AM	SiCl4 pre valve closed
8/6/2012	11:37:55 AM	SiCl4 post valve closed
8/6/2012	11:37:55 AM	Bypass valve closed
8/6/2012	11:37:55 AM	Bubbler valve closed
8/6/2012	11:37:55 AM	Helium valve opened
8/6/2012	11:37:55 AM	Main Vac valve opened
8/6/2012	11:37:55 AM	Helium MFC set to  20.000000
8/6/2012	11:37:55 AM	H2 MFC set to  0.000000
8/6/2012	11:37:55 AM	BCl3 MFC set to  0.000000
8/6/2012	11:37:55 AM	PH3 MFC set to  0.000000
8/6/2012	11:37:55 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:37:55 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:37:55 AM	Tube furnace set to 0
8/6/2012	11:38:25 AM	Helium valve closed
8/6/2012	11:38:25 AM	H2 valve closed
8/6/2012	11:38:25 AM	BCl3 valve closed
8/6/2012	11:38:25 AM	PH3 valve closed
8/6/2012	11:38:25 AM	SiCl4 pre valve closed
8/6/2012	11:38:25 AM	SiCl4 post valve closed
8/6/2012	11:38:25 AM	Bypass valve closed
8/6/2012	11:38:25 AM	Bubbler valve closed
8/6/2012	11:38:25 AM	Main Vac valve opened
8/6/2012	11:38:25 AM	Helium MFC set to  0.000000
8/6/2012	11:38:25 AM	H2 MFC set to  0.000000
8/6/2012	11:38:25 AM	BCl3 MFC set to  0.000000
8/6/2012	11:38:25 AM	PH3 MFC set to  0.000000
8/6/2012	11:38:25 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:38:25 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:38:26 AM	Tube furnace set to 0
8/6/2012	11:38:56 AM	H2 valve closed
8/6/2012	11:38:56 AM	BCl3 valve closed
8/6/2012	11:38:56 AM	PH3 valve closed
8/6/2012	11:38:56 AM	SiCl4 pre valve closed
8/6/2012	11:38:56 AM	SiCl4 post valve closed
8/6/2012	11:38:56 AM	Bypass valve closed
8/6/2012	11:38:56 AM	Bubbler valve closed
8/6/2012	11:38:56 AM	Helium valve opened
8/6/2012	11:38:56 AM	Main Vac valve opened
8/6/2012	11:38:56 AM	Helium MFC set to  20.000000
8/6/2012	11:38:56 AM	H2 MFC set to  0.000000
8/6/2012	11:38:56 AM	BCl3 MFC set to  0.000000
8/6/2012	11:38:56 AM	PH3 MFC set to  0.000000
8/6/2012	11:38:56 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:38:56 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:38:56 AM	Tube furnace set to 0
8/6/2012	11:39:26 AM	Helium valve closed
8/6/2012	11:39:26 AM	H2 valve closed
8/6/2012	11:39:26 AM	BCl3 valve closed
8/6/2012	11:39:26 AM	PH3 valve closed
8/6/2012	11:39:26 AM	SiCl4 pre valve closed
8/6/2012	11:39:26 AM	SiCl4 post valve closed
8/6/2012	11:39:26 AM	Bypass valve closed
8/6/2012	11:39:26 AM	Bubbler valve closed
8/6/2012	11:39:26 AM	Main Vac valve opened
8/6/2012	11:39:26 AM	Helium MFC set to  0.000000
8/6/2012	11:39:26 AM	H2 MFC set to  0.000000
8/6/2012	11:39:26 AM	BCl3 MFC set to  0.000000
8/6/2012	11:39:26 AM	PH3 MFC set to  0.000000
8/6/2012	11:39:26 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:39:26 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:39:26 AM	Tube furnace set to 0
8/6/2012	11:39:56 AM	H2 valve closed
8/6/2012	11:39:56 AM	BCl3 valve closed
8/6/2012	11:39:56 AM	PH3 valve closed
8/6/2012	11:39:56 AM	SiCl4 pre valve closed
8/6/2012	11:39:56 AM	SiCl4 post valve closed
8/6/2012	11:39:56 AM	Bypass valve closed
8/6/2012	11:39:56 AM	Bubbler valve closed
8/6/2012	11:39:56 AM	Helium valve opened
8/6/2012	11:39:56 AM	Main Vac valve opened
8/6/2012	11:39:56 AM	Helium MFC set to  20.000000
8/6/2012	11:39:56 AM	H2 MFC set to  0.000000
8/6/2012	11:39:56 AM	BCl3 MFC set to  0.000000
8/6/2012	11:39:56 AM	PH3 MFC set to  0.000000
8/6/2012	11:39:56 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:39:56 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:39:56 AM	Tube furnace set to 0
8/6/2012	11:40:26 AM	Helium valve closed
8/6/2012	11:40:26 AM	H2 valve closed
8/6/2012	11:40:26 AM	BCl3 valve closed
8/6/2012	11:40:26 AM	PH3 valve closed
8/6/2012	11:40:26 AM	SiCl4 pre valve closed
8/6/2012	11:40:26 AM	SiCl4 post valve closed
8/6/2012	11:40:26 AM	Bypass valve closed
8/6/2012	11:40:26 AM	Bubbler valve closed
8/6/2012	11:40:26 AM	Main Vac valve opened
8/6/2012	11:40:26 AM	Helium MFC set to  0.000000
8/6/2012	11:40:26 AM	H2 MFC set to  0.000000
8/6/2012	11:40:26 AM	BCl3 MFC set to  0.000000
8/6/2012	11:40:26 AM	PH3 MFC set to  0.000000
8/6/2012	11:40:26 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:40:26 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:40:26 AM	Tube furnace set to 0
8/6/2012	11:40:56 AM	H2 valve closed
8/6/2012	11:40:57 AM	BCl3 valve closed
8/6/2012	11:40:57 AM	PH3 valve closed
8/6/2012	11:40:57 AM	SiCl4 pre valve closed
8/6/2012	11:40:57 AM	SiCl4 post valve closed
8/6/2012	11:40:57 AM	Bypass valve closed
8/6/2012	11:40:57 AM	Bubbler valve closed
8/6/2012	11:40:57 AM	Helium valve opened
8/6/2012	11:40:57 AM	Main Vac valve opened
8/6/2012	11:40:57 AM	Helium MFC set to  20.000000
8/6/2012	11:40:57 AM	H2 MFC set to  0.000000
8/6/2012	11:40:57 AM	BCl3 MFC set to  0.000000
8/6/2012	11:40:57 AM	PH3 MFC set to  0.000000
8/6/2012	11:40:57 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:40:57 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:40:57 AM	Tube furnace set to 0
8/6/2012	11:41:27 AM	Helium valve closed
8/6/2012	11:41:27 AM	H2 valve closed
8/6/2012	11:41:27 AM	BCl3 valve closed
8/6/2012	11:41:27 AM	PH3 valve closed
8/6/2012	11:41:27 AM	SiCl4 pre valve closed
8/6/2012	11:41:27 AM	SiCl4 post valve closed
8/6/2012	11:41:27 AM	Bypass valve closed
8/6/2012	11:41:27 AM	Bubbler valve closed
8/6/2012	11:41:27 AM	Main Vac valve opened
8/6/2012	11:41:27 AM	Helium MFC set to  0.000000
8/6/2012	11:41:27 AM	H2 MFC set to  0.000000
8/6/2012	11:41:27 AM	BCl3 MFC set to  0.000000
8/6/2012	11:41:27 AM	PH3 MFC set to  0.000000
8/6/2012	11:41:27 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:41:27 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:41:27 AM	Tube furnace set to 0
8/6/2012	11:41:57 AM	H2 valve closed
8/6/2012	11:41:57 AM	BCl3 valve closed
8/6/2012	11:41:57 AM	PH3 valve closed
8/6/2012	11:41:57 AM	SiCl4 pre valve closed
8/6/2012	11:41:57 AM	SiCl4 post valve closed
8/6/2012	11:41:57 AM	Bypass valve closed
8/6/2012	11:41:57 AM	Bubbler valve closed
8/6/2012	11:41:57 AM	Helium valve opened
8/6/2012	11:41:57 AM	Main Vac valve opened
8/6/2012	11:41:57 AM	Helium MFC set to  20.000000
8/6/2012	11:41:57 AM	H2 MFC set to  0.000000
8/6/2012	11:41:57 AM	BCl3 MFC set to  0.000000
8/6/2012	11:41:57 AM	PH3 MFC set to  0.000000
8/6/2012	11:41:57 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:41:57 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:41:57 AM	Tube furnace set to 0
8/6/2012	11:42:27 AM	Helium valve closed
8/6/2012	11:42:27 AM	H2 valve closed
8/6/2012	11:42:27 AM	BCl3 valve closed
8/6/2012	11:42:27 AM	PH3 valve closed
8/6/2012	11:42:27 AM	SiCl4 pre valve closed
8/6/2012	11:42:27 AM	SiCl4 post valve closed
8/6/2012	11:42:27 AM	Bypass valve closed
8/6/2012	11:42:27 AM	Bubbler valve closed
8/6/2012	11:42:27 AM	Main Vac valve opened
8/6/2012	11:42:27 AM	Helium MFC set to  0.000000
8/6/2012	11:42:27 AM	H2 MFC set to  0.000000
8/6/2012	11:42:27 AM	BCl3 MFC set to  0.000000
8/6/2012	11:42:27 AM	PH3 MFC set to  0.000000
8/6/2012	11:42:27 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:42:27 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:42:27 AM	Tube furnace set to 0
8/6/2012	11:42:57 AM	H2 valve closed
8/6/2012	11:42:57 AM	BCl3 valve closed
8/6/2012	11:42:57 AM	PH3 valve closed
8/6/2012	11:42:57 AM	SiCl4 pre valve closed
8/6/2012	11:42:57 AM	SiCl4 post valve closed
8/6/2012	11:42:57 AM	Bypass valve closed
8/6/2012	11:42:57 AM	Bubbler valve closed
8/6/2012	11:42:57 AM	Helium valve opened
8/6/2012	11:42:57 AM	Main Vac valve opened
8/6/2012	11:42:57 AM	Helium MFC set to  20.000000
8/6/2012	11:42:57 AM	H2 MFC set to  0.000000
8/6/2012	11:42:57 AM	BCl3 MFC set to  0.000000
8/6/2012	11:42:58 AM	PH3 MFC set to  0.000000
8/6/2012	11:42:58 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:42:58 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:42:58 AM	Tube furnace set to 0
8/6/2012	11:43:28 AM	Helium valve closed
8/6/2012	11:43:28 AM	H2 valve closed
8/6/2012	11:43:28 AM	BCl3 valve closed
8/6/2012	11:43:28 AM	PH3 valve closed
8/6/2012	11:43:28 AM	SiCl4 pre valve closed
8/6/2012	11:43:28 AM	SiCl4 post valve closed
8/6/2012	11:43:28 AM	Bypass valve closed
8/6/2012	11:43:28 AM	Bubbler valve closed
8/6/2012	11:43:28 AM	Main Vac valve opened
8/6/2012	11:43:28 AM	Helium MFC set to  0.000000
8/6/2012	11:43:28 AM	H2 MFC set to  0.000000
8/6/2012	11:43:28 AM	BCl3 MFC set to  0.000000
8/6/2012	11:43:28 AM	PH3 MFC set to  0.000000
8/6/2012	11:43:28 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:43:28 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:43:28 AM	Tube furnace set to 0
8/6/2012	11:43:58 AM	H2 valve closed
8/6/2012	11:43:58 AM	BCl3 valve closed
8/6/2012	11:43:58 AM	PH3 valve closed
8/6/2012	11:43:58 AM	SiCl4 pre valve closed
8/6/2012	11:43:58 AM	SiCl4 post valve closed
8/6/2012	11:43:58 AM	Bypass valve closed
8/6/2012	11:43:58 AM	Bubbler valve closed
8/6/2012	11:43:58 AM	Helium valve opened
8/6/2012	11:43:58 AM	Main Vac valve opened
8/6/2012	11:43:58 AM	Helium MFC set to  20.000000
8/6/2012	11:43:58 AM	H2 MFC set to  0.000000
8/6/2012	11:43:58 AM	BCl3 MFC set to  0.000000
8/6/2012	11:43:58 AM	PH3 MFC set to  0.000000
8/6/2012	11:43:58 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:43:58 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:43:58 AM	Tube furnace set to 0
8/6/2012	11:44:28 AM	Helium valve closed
8/6/2012	11:44:28 AM	H2 valve closed
8/6/2012	11:44:28 AM	BCl3 valve closed
8/6/2012	11:44:28 AM	PH3 valve closed
8/6/2012	11:44:28 AM	SiCl4 pre valve closed
8/6/2012	11:44:28 AM	SiCl4 post valve closed
8/6/2012	11:44:28 AM	Bypass valve closed
8/6/2012	11:44:28 AM	Bubbler valve closed
8/6/2012	11:44:28 AM	Main Vac valve opened
8/6/2012	11:44:28 AM	Helium MFC set to  0.000000
8/6/2012	11:44:28 AM	H2 MFC set to  0.000000
8/6/2012	11:44:28 AM	BCl3 MFC set to  0.000000
8/6/2012	11:44:28 AM	PH3 MFC set to  0.000000
8/6/2012	11:44:28 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:44:28 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:44:28 AM	Tube furnace set to 0
8/6/2012	11:44:29 AM	Run finished at 11:44 AM
8/6/2012	11:44:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/6/2012	11:47:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/6/2012	11:47:38 AM	Recipe started at 11:47 AM
8/6/2012	11:47:38 AM	Helium valve closed
8/6/2012	11:47:38 AM	H2 valve closed
8/6/2012	11:47:38 AM	BCl3 valve closed
8/6/2012	11:47:38 AM	PH3 valve closed
8/6/2012	11:47:38 AM	SiCl4 pre valve closed
8/6/2012	11:47:38 AM	SiCl4 post valve closed
8/6/2012	11:47:38 AM	Main Vac valve closed
8/6/2012	11:47:38 AM	Bubbler valve closed
8/6/2012	11:47:38 AM	Bypass valve opened
8/6/2012	11:47:38 AM	Helium MFC set to  0.000000
8/6/2012	11:47:38 AM	H2 MFC set to  0.000000
8/6/2012	11:47:38 AM	BCl3 MFC set to  0.000000
8/6/2012	11:47:38 AM	PH3 MFC set to  0.000000
8/6/2012	11:47:38 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:47:38 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:47:38 AM	Tube furnace set to 0
8/6/2012	11:47:39 AM	Helium valve closed
8/6/2012	11:47:39 AM	H2 valve closed
8/6/2012	11:47:39 AM	BCl3 valve closed
8/6/2012	11:47:39 AM	PH3 valve closed
8/6/2012	11:47:39 AM	SiCl4 pre valve closed
8/6/2012	11:47:39 AM	SiCl4 post valve closed
8/6/2012	11:47:39 AM	Main Vac valve closed
8/6/2012	11:47:39 AM	Bubbler valve closed
8/6/2012	11:47:39 AM	Bypass valve opened
8/6/2012	11:47:39 AM	Helium MFC set to  0.000000
8/6/2012	11:47:39 AM	H2 MFC set to  0.000000
8/6/2012	11:47:39 AM	BCl3 MFC set to  0.000000
8/6/2012	11:47:39 AM	PH3 MFC set to  0.000000
8/6/2012	11:47:39 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:47:39 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:47:39 AM	Tube furnace set to 0
8/6/2012	11:48:09 AM	Helium valve closed
8/6/2012	11:48:09 AM	H2 valve closed
8/6/2012	11:48:09 AM	BCl3 valve closed
8/6/2012	11:48:09 AM	PH3 valve closed
8/6/2012	11:48:09 AM	SiCl4 pre valve closed
8/6/2012	11:48:09 AM	SiCl4 post valve closed
8/6/2012	11:48:09 AM	Bypass valve closed
8/6/2012	11:48:09 AM	Bubbler valve closed
8/6/2012	11:48:09 AM	Main Vac valve opened
8/6/2012	11:48:09 AM	Helium MFC set to  0.000000
8/6/2012	11:48:09 AM	H2 MFC set to  0.000000
8/6/2012	11:48:09 AM	BCl3 MFC set to  0.000000
8/6/2012	11:48:09 AM	PH3 MFC set to  0.000000
8/6/2012	11:48:09 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:48:09 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:48:09 AM	Tube furnace set to 0
8/6/2012	11:48:39 AM	H2 valve closed
8/6/2012	11:48:39 AM	BCl3 valve closed
8/6/2012	11:48:39 AM	PH3 valve closed
8/6/2012	11:48:39 AM	SiCl4 pre valve closed
8/6/2012	11:48:39 AM	SiCl4 post valve closed
8/6/2012	11:48:39 AM	Bypass valve closed
8/6/2012	11:48:39 AM	Bubbler valve closed
8/6/2012	11:48:39 AM	Helium valve opened
8/6/2012	11:48:39 AM	Main Vac valve opened
8/6/2012	11:48:39 AM	Helium MFC set to  20.000000
8/6/2012	11:48:39 AM	H2 MFC set to  0.000000
8/6/2012	11:48:39 AM	BCl3 MFC set to  0.000000
8/6/2012	11:48:39 AM	PH3 MFC set to  0.000000
8/6/2012	11:48:39 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:48:39 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:48:39 AM	Tube furnace set to 0
8/6/2012	11:49:09 AM	Helium valve closed
8/6/2012	11:49:09 AM	H2 valve closed
8/6/2012	11:49:09 AM	BCl3 valve closed
8/6/2012	11:49:09 AM	PH3 valve closed
8/6/2012	11:49:09 AM	SiCl4 pre valve closed
8/6/2012	11:49:09 AM	SiCl4 post valve closed
8/6/2012	11:49:09 AM	Bypass valve closed
8/6/2012	11:49:09 AM	Bubbler valve closed
8/6/2012	11:49:09 AM	Main Vac valve opened
8/6/2012	11:49:09 AM	Helium MFC set to  0.000000
8/6/2012	11:49:09 AM	H2 MFC set to  0.000000
8/6/2012	11:49:09 AM	BCl3 MFC set to  0.000000
8/6/2012	11:49:09 AM	PH3 MFC set to  0.000000
8/6/2012	11:49:09 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:49:09 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:49:09 AM	Tube furnace set to 0
8/6/2012	11:49:39 AM	H2 valve closed
8/6/2012	11:49:39 AM	BCl3 valve closed
8/6/2012	11:49:39 AM	PH3 valve closed
8/6/2012	11:49:39 AM	SiCl4 pre valve closed
8/6/2012	11:49:39 AM	SiCl4 post valve closed
8/6/2012	11:49:39 AM	Bypass valve closed
8/6/2012	11:49:39 AM	Bubbler valve closed
8/6/2012	11:49:39 AM	Helium valve opened
8/6/2012	11:49:39 AM	Main Vac valve opened
8/6/2012	11:49:39 AM	Helium MFC set to  20.000000
8/6/2012	11:49:40 AM	H2 MFC set to  0.000000
8/6/2012	11:49:40 AM	BCl3 MFC set to  0.000000
8/6/2012	11:49:40 AM	PH3 MFC set to  0.000000
8/6/2012	11:49:40 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:49:40 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:49:40 AM	Tube furnace set to 0
8/6/2012	11:50:10 AM	Helium valve closed
8/6/2012	11:50:10 AM	H2 valve closed
8/6/2012	11:50:10 AM	BCl3 valve closed
8/6/2012	11:50:10 AM	PH3 valve closed
8/6/2012	11:50:10 AM	SiCl4 pre valve closed
8/6/2012	11:50:10 AM	SiCl4 post valve closed
8/6/2012	11:50:10 AM	Bypass valve closed
8/6/2012	11:50:10 AM	Bubbler valve closed
8/6/2012	11:50:10 AM	Main Vac valve opened
8/6/2012	11:50:10 AM	Helium MFC set to  0.000000
8/6/2012	11:50:10 AM	H2 MFC set to  0.000000
8/6/2012	11:50:10 AM	BCl3 MFC set to  0.000000
8/6/2012	11:50:10 AM	PH3 MFC set to  0.000000
8/6/2012	11:50:10 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:50:10 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:50:10 AM	Tube furnace set to 0
8/6/2012	11:50:40 AM	H2 valve closed
8/6/2012	11:50:40 AM	BCl3 valve closed
8/6/2012	11:50:40 AM	PH3 valve closed
8/6/2012	11:50:40 AM	SiCl4 pre valve closed
8/6/2012	11:50:40 AM	SiCl4 post valve closed
8/6/2012	11:50:40 AM	Bypass valve closed
8/6/2012	11:50:40 AM	Bubbler valve closed
8/6/2012	11:50:40 AM	Helium valve opened
8/6/2012	11:50:40 AM	Main Vac valve opened
8/6/2012	11:50:40 AM	Helium MFC set to  20.000000
8/6/2012	11:50:40 AM	H2 MFC set to  0.000000
8/6/2012	11:50:40 AM	BCl3 MFC set to  0.000000
8/6/2012	11:50:40 AM	PH3 MFC set to  0.000000
8/6/2012	11:50:40 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:50:40 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:50:40 AM	Tube furnace set to 0
8/6/2012	11:51:10 AM	Helium valve closed
8/6/2012	11:51:10 AM	H2 valve closed
8/6/2012	11:51:10 AM	BCl3 valve closed
8/6/2012	11:51:10 AM	PH3 valve closed
8/6/2012	11:51:10 AM	SiCl4 pre valve closed
8/6/2012	11:51:10 AM	SiCl4 post valve closed
8/6/2012	11:51:10 AM	Bypass valve closed
8/6/2012	11:51:10 AM	Bubbler valve closed
8/6/2012	11:51:10 AM	Main Vac valve opened
8/6/2012	11:51:10 AM	Helium MFC set to  0.000000
8/6/2012	11:51:10 AM	H2 MFC set to  0.000000
8/6/2012	11:51:10 AM	BCl3 MFC set to  0.000000
8/6/2012	11:51:10 AM	PH3 MFC set to  0.000000
8/6/2012	11:51:10 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:51:10 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:51:10 AM	Tube furnace set to 0
8/6/2012	11:51:40 AM	H2 valve closed
8/6/2012	11:51:40 AM	BCl3 valve closed
8/6/2012	11:51:40 AM	PH3 valve closed
8/6/2012	11:51:40 AM	SiCl4 pre valve closed
8/6/2012	11:51:40 AM	SiCl4 post valve closed
8/6/2012	11:51:40 AM	Bypass valve closed
8/6/2012	11:51:40 AM	Bubbler valve closed
8/6/2012	11:51:40 AM	Helium valve opened
8/6/2012	11:51:40 AM	Main Vac valve opened
8/6/2012	11:51:40 AM	Helium MFC set to  20.000000
8/6/2012	11:51:40 AM	H2 MFC set to  0.000000
8/6/2012	11:51:40 AM	BCl3 MFC set to  0.000000
8/6/2012	11:51:40 AM	PH3 MFC set to  0.000000
8/6/2012	11:51:40 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:51:40 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:51:41 AM	Tube furnace set to 0
8/6/2012	11:52:11 AM	Helium valve closed
8/6/2012	11:52:11 AM	H2 valve closed
8/6/2012	11:52:11 AM	BCl3 valve closed
8/6/2012	11:52:11 AM	PH3 valve closed
8/6/2012	11:52:11 AM	SiCl4 pre valve closed
8/6/2012	11:52:11 AM	SiCl4 post valve closed
8/6/2012	11:52:11 AM	Bypass valve closed
8/6/2012	11:52:11 AM	Bubbler valve closed
8/6/2012	11:52:11 AM	Main Vac valve opened
8/6/2012	11:52:11 AM	Helium MFC set to  0.000000
8/6/2012	11:52:11 AM	H2 MFC set to  0.000000
8/6/2012	11:52:11 AM	BCl3 MFC set to  0.000000
8/6/2012	11:52:11 AM	PH3 MFC set to  0.000000
8/6/2012	11:52:11 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:52:11 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:52:11 AM	Tube furnace set to 0
8/6/2012	11:52:41 AM	H2 valve closed
8/6/2012	11:52:41 AM	BCl3 valve closed
8/6/2012	11:52:41 AM	PH3 valve closed
8/6/2012	11:52:41 AM	SiCl4 pre valve closed
8/6/2012	11:52:41 AM	SiCl4 post valve closed
8/6/2012	11:52:41 AM	Bypass valve closed
8/6/2012	11:52:41 AM	Bubbler valve closed
8/6/2012	11:52:41 AM	Helium valve opened
8/6/2012	11:52:41 AM	Main Vac valve opened
8/6/2012	11:52:41 AM	Helium MFC set to  20.000000
8/6/2012	11:52:41 AM	H2 MFC set to  0.000000
8/6/2012	11:52:41 AM	BCl3 MFC set to  0.000000
8/6/2012	11:52:41 AM	PH3 MFC set to  0.000000
8/6/2012	11:52:41 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:52:41 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:52:41 AM	Tube furnace set to 0
8/6/2012	11:53:11 AM	Helium valve closed
8/6/2012	11:53:11 AM	H2 valve closed
8/6/2012	11:53:11 AM	BCl3 valve closed
8/6/2012	11:53:11 AM	PH3 valve closed
8/6/2012	11:53:11 AM	SiCl4 pre valve closed
8/6/2012	11:53:11 AM	SiCl4 post valve closed
8/6/2012	11:53:11 AM	Bypass valve closed
8/6/2012	11:53:11 AM	Bubbler valve closed
8/6/2012	11:53:11 AM	Main Vac valve opened
8/6/2012	11:53:11 AM	Helium MFC set to  0.000000
8/6/2012	11:53:11 AM	H2 MFC set to  0.000000
8/6/2012	11:53:11 AM	BCl3 MFC set to  0.000000
8/6/2012	11:53:11 AM	PH3 MFC set to  0.000000
8/6/2012	11:53:11 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:53:11 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:53:11 AM	Tube furnace set to 0
8/6/2012	11:53:41 AM	H2 valve closed
8/6/2012	11:53:41 AM	BCl3 valve closed
8/6/2012	11:53:41 AM	PH3 valve closed
8/6/2012	11:53:41 AM	SiCl4 pre valve closed
8/6/2012	11:53:41 AM	SiCl4 post valve closed
8/6/2012	11:53:41 AM	Bypass valve closed
8/6/2012	11:53:41 AM	Bubbler valve closed
8/6/2012	11:53:41 AM	Helium valve opened
8/6/2012	11:53:41 AM	Main Vac valve opened
8/6/2012	11:53:41 AM	Helium MFC set to  20.000000
8/6/2012	11:53:41 AM	H2 MFC set to  0.000000
8/6/2012	11:53:41 AM	BCl3 MFC set to  0.000000
8/6/2012	11:53:41 AM	PH3 MFC set to  0.000000
8/6/2012	11:53:41 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:53:41 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:53:42 AM	Tube furnace set to 0
8/6/2012	11:54:12 AM	Helium valve closed
8/6/2012	11:54:12 AM	H2 valve closed
8/6/2012	11:54:12 AM	BCl3 valve closed
8/6/2012	11:54:12 AM	PH3 valve closed
8/6/2012	11:54:12 AM	SiCl4 pre valve closed
8/6/2012	11:54:12 AM	SiCl4 post valve closed
8/6/2012	11:54:12 AM	Bypass valve closed
8/6/2012	11:54:12 AM	Bubbler valve closed
8/6/2012	11:54:12 AM	Main Vac valve opened
8/6/2012	11:54:12 AM	Helium MFC set to  0.000000
8/6/2012	11:54:12 AM	H2 MFC set to  0.000000
8/6/2012	11:54:12 AM	BCl3 MFC set to  0.000000
8/6/2012	11:54:12 AM	PH3 MFC set to  0.000000
8/6/2012	11:54:12 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:54:12 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:54:12 AM	Tube furnace set to 0
8/6/2012	11:54:42 AM	H2 valve closed
8/6/2012	11:54:42 AM	BCl3 valve closed
8/6/2012	11:54:42 AM	PH3 valve closed
8/6/2012	11:54:42 AM	SiCl4 pre valve closed
8/6/2012	11:54:42 AM	SiCl4 post valve closed
8/6/2012	11:54:42 AM	Bypass valve closed
8/6/2012	11:54:42 AM	Bubbler valve closed
8/6/2012	11:54:42 AM	Helium valve opened
8/6/2012	11:54:42 AM	Main Vac valve opened
8/6/2012	11:54:42 AM	Helium MFC set to  20.000000
8/6/2012	11:54:42 AM	H2 MFC set to  0.000000
8/6/2012	11:54:42 AM	BCl3 MFC set to  0.000000
8/6/2012	11:54:42 AM	PH3 MFC set to  0.000000
8/6/2012	11:54:42 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:54:42 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:54:42 AM	Tube furnace set to 0
8/6/2012	11:55:12 AM	Helium valve closed
8/6/2012	11:55:12 AM	H2 valve closed
8/6/2012	11:55:12 AM	BCl3 valve closed
8/6/2012	11:55:12 AM	PH3 valve closed
8/6/2012	11:55:12 AM	SiCl4 pre valve closed
8/6/2012	11:55:12 AM	SiCl4 post valve closed
8/6/2012	11:55:12 AM	Bypass valve closed
8/6/2012	11:55:12 AM	Bubbler valve closed
8/6/2012	11:55:12 AM	Main Vac valve opened
8/6/2012	11:55:12 AM	Helium MFC set to  0.000000
8/6/2012	11:55:12 AM	H2 MFC set to  0.000000
8/6/2012	11:55:12 AM	BCl3 MFC set to  0.000000
8/6/2012	11:55:12 AM	PH3 MFC set to  0.000000
8/6/2012	11:55:12 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:55:12 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:55:12 AM	Tube furnace set to 0
8/6/2012	11:55:42 AM	H2 valve closed
8/6/2012	11:55:42 AM	BCl3 valve closed
8/6/2012	11:55:42 AM	PH3 valve closed
8/6/2012	11:55:42 AM	SiCl4 pre valve closed
8/6/2012	11:55:42 AM	SiCl4 post valve closed
8/6/2012	11:55:42 AM	Bypass valve closed
8/6/2012	11:55:42 AM	Bubbler valve closed
8/6/2012	11:55:42 AM	Helium valve opened
8/6/2012	11:55:42 AM	Main Vac valve opened
8/6/2012	11:55:42 AM	Helium MFC set to  20.000000
8/6/2012	11:55:42 AM	H2 MFC set to  0.000000
8/6/2012	11:55:42 AM	BCl3 MFC set to  0.000000
8/6/2012	11:55:42 AM	PH3 MFC set to  0.000000
8/6/2012	11:55:42 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:55:42 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:55:42 AM	Tube furnace set to 0
8/6/2012	11:56:13 AM	Helium valve closed
8/6/2012	11:56:13 AM	H2 valve closed
8/6/2012	11:56:13 AM	BCl3 valve closed
8/6/2012	11:56:13 AM	PH3 valve closed
8/6/2012	11:56:13 AM	SiCl4 pre valve closed
8/6/2012	11:56:13 AM	SiCl4 post valve closed
8/6/2012	11:56:13 AM	Bypass valve closed
8/6/2012	11:56:13 AM	Bubbler valve closed
8/6/2012	11:56:13 AM	Main Vac valve opened
8/6/2012	11:56:13 AM	Helium MFC set to  0.000000
8/6/2012	11:56:13 AM	H2 MFC set to  0.000000
8/6/2012	11:56:13 AM	BCl3 MFC set to  0.000000
8/6/2012	11:56:13 AM	PH3 MFC set to  0.000000
8/6/2012	11:56:13 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:56:13 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:56:13 AM	Tube furnace set to 0
8/6/2012	11:56:43 AM	H2 valve closed
8/6/2012	11:56:43 AM	BCl3 valve closed
8/6/2012	11:56:43 AM	PH3 valve closed
8/6/2012	11:56:43 AM	SiCl4 pre valve closed
8/6/2012	11:56:43 AM	SiCl4 post valve closed
8/6/2012	11:56:43 AM	Bypass valve closed
8/6/2012	11:56:43 AM	Bubbler valve closed
8/6/2012	11:56:43 AM	Helium valve opened
8/6/2012	11:56:43 AM	Main Vac valve opened
8/6/2012	11:56:43 AM	Helium MFC set to  20.000000
8/6/2012	11:56:43 AM	H2 MFC set to  0.000000
8/6/2012	11:56:43 AM	BCl3 MFC set to  0.000000
8/6/2012	11:56:43 AM	PH3 MFC set to  0.000000
8/6/2012	11:56:43 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:56:43 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:56:43 AM	Tube furnace set to 0
8/6/2012	11:57:13 AM	Helium valve closed
8/6/2012	11:57:13 AM	H2 valve closed
8/6/2012	11:57:13 AM	BCl3 valve closed
8/6/2012	11:57:13 AM	PH3 valve closed
8/6/2012	11:57:13 AM	SiCl4 pre valve closed
8/6/2012	11:57:13 AM	SiCl4 post valve closed
8/6/2012	11:57:13 AM	Bypass valve closed
8/6/2012	11:57:13 AM	Bubbler valve closed
8/6/2012	11:57:13 AM	Main Vac valve opened
8/6/2012	11:57:13 AM	Helium MFC set to  0.000000
8/6/2012	11:57:13 AM	H2 MFC set to  0.000000
8/6/2012	11:57:13 AM	BCl3 MFC set to  0.000000
8/6/2012	11:57:13 AM	PH3 MFC set to  0.000000
8/6/2012	11:57:13 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:57:13 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:57:13 AM	Tube furnace set to 0
8/6/2012	11:57:43 AM	H2 valve closed
8/6/2012	11:57:43 AM	BCl3 valve closed
8/6/2012	11:57:43 AM	PH3 valve closed
8/6/2012	11:57:43 AM	SiCl4 pre valve closed
8/6/2012	11:57:43 AM	SiCl4 post valve closed
8/6/2012	11:57:43 AM	Bypass valve closed
8/6/2012	11:57:43 AM	Bubbler valve closed
8/6/2012	11:57:43 AM	Helium valve opened
8/6/2012	11:57:43 AM	Main Vac valve opened
8/6/2012	11:57:43 AM	Helium MFC set to  20.000000
8/6/2012	11:57:43 AM	H2 MFC set to  0.000000
8/6/2012	11:57:43 AM	BCl3 MFC set to  0.000000
8/6/2012	11:57:43 AM	PH3 MFC set to  0.000000
8/6/2012	11:57:43 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:57:43 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:57:43 AM	Tube furnace set to 0
8/6/2012	11:58:13 AM	Helium valve closed
8/6/2012	11:58:13 AM	H2 valve closed
8/6/2012	11:58:14 AM	BCl3 valve closed
8/6/2012	11:58:14 AM	PH3 valve closed
8/6/2012	11:58:14 AM	SiCl4 pre valve closed
8/6/2012	11:58:14 AM	SiCl4 post valve closed
8/6/2012	11:58:14 AM	Bypass valve closed
8/6/2012	11:58:14 AM	Bubbler valve closed
8/6/2012	11:58:14 AM	Main Vac valve opened
8/6/2012	11:58:14 AM	Helium MFC set to  0.000000
8/6/2012	11:58:14 AM	H2 MFC set to  0.000000
8/6/2012	11:58:14 AM	BCl3 MFC set to  0.000000
8/6/2012	11:58:14 AM	PH3 MFC set to  0.000000
8/6/2012	11:58:14 AM	SiCl4 MFC set to  0.000000
8/6/2012	11:58:14 AM	Bypass solenoid MFC set to  0.000000
8/6/2012	11:58:14 AM	Tube furnace set to 0
8/6/2012	11:58:15 AM	Run finished at 11:58 AM
8/6/2012	11:58:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/6/2012	12:03:29 PM	Recipe started at 12:03 PM
8/6/2012	12:03:29 PM	Helium valve closed
8/6/2012	12:03:29 PM	H2 valve closed
8/6/2012	12:03:29 PM	BCl3 valve closed
8/6/2012	12:03:29 PM	PH3 valve closed
8/6/2012	12:03:29 PM	SiCl4 pre valve closed
8/6/2012	12:03:29 PM	SiCl4 post valve closed
8/6/2012	12:03:29 PM	Main Vac valve closed
8/6/2012	12:03:29 PM	Bypass valve closed
8/6/2012	12:03:29 PM	Bubbler valve closed
8/6/2012	12:03:29 PM	Helium MFC set to  0.000000
8/6/2012	12:03:29 PM	H2 MFC set to  0.000000
8/6/2012	12:03:29 PM	BCl3 MFC set to  0.000000
8/6/2012	12:03:29 PM	PH3 MFC set to  0.000000
8/6/2012	12:03:29 PM	SiCl4 MFC set to  0.000000
8/6/2012	12:03:29 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	12:03:29 PM	Tube furnace set to 0
8/6/2012	12:03:32 PM	Helium valve closed
8/6/2012	12:03:32 PM	BCl3 valve closed
8/6/2012	12:03:32 PM	PH3 valve closed
8/6/2012	12:03:32 PM	SiCl4 pre valve closed
8/6/2012	12:03:32 PM	SiCl4 post valve closed
8/6/2012	12:03:32 PM	Main Vac valve closed
8/6/2012	12:03:32 PM	Bypass valve closed
8/6/2012	12:03:32 PM	Bubbler valve closed
8/6/2012	12:03:32 PM	H2 valve opened
8/6/2012	12:03:32 PM	Helium MFC set to  0.000000
8/6/2012	12:03:33 PM	H2 MFC set to  500.000000
8/6/2012	12:03:33 PM	BCl3 MFC set to  0.000000
8/6/2012	12:03:33 PM	PH3 MFC set to  0.000000
8/6/2012	12:03:33 PM	SiCl4 MFC set to  0.000000
8/6/2012	12:03:33 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	12:03:33 PM	Tube furnace set to 0
8/6/2012	12:04:49 PM	Helium valve closed
8/6/2012	12:04:49 PM	BCl3 valve closed
8/6/2012	12:04:49 PM	PH3 valve closed
8/6/2012	12:04:49 PM	SiCl4 pre valve closed
8/6/2012	12:04:49 PM	SiCl4 post valve closed
8/6/2012	12:04:49 PM	Main Vac valve closed
8/6/2012	12:04:49 PM	Bypass valve closed
8/6/2012	12:04:49 PM	H2 valve opened
8/6/2012	12:04:49 PM	Bubbler valve opened
8/6/2012	12:04:49 PM	Helium MFC set to  0.000000
8/6/2012	12:04:49 PM	H2 MFC set to  500.000000
8/6/2012	12:04:49 PM	BCl3 MFC set to  0.000000
8/6/2012	12:04:50 PM	PH3 MFC set to  0.000000
8/6/2012	12:04:50 PM	SiCl4 MFC set to  0.000000
8/6/2012	12:04:50 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	12:04:50 PM	Tube furnace set to 0
8/6/2012	12:04:51 PM	Helium valve closed
8/6/2012	12:04:51 PM	BCl3 valve closed
8/6/2012	12:04:51 PM	PH3 valve closed
8/6/2012	12:04:51 PM	SiCl4 pre valve closed
8/6/2012	12:04:51 PM	SiCl4 post valve closed
8/6/2012	12:04:51 PM	Main Vac valve closed
8/6/2012	12:04:51 PM	Bypass valve closed
8/6/2012	12:04:51 PM	H2 valve opened
8/6/2012	12:04:51 PM	Bubbler valve opened
8/6/2012	12:04:51 PM	Helium MFC set to  0.000000
8/6/2012	12:04:51 PM	H2 MFC set to  500.000000
8/6/2012	12:04:51 PM	BCl3 MFC set to  0.000000
8/6/2012	12:04:51 PM	PH3 MFC set to  0.000000
8/6/2012	12:04:51 PM	SiCl4 MFC set to  0.000000
8/6/2012	12:04:51 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	12:04:51 PM	Tube furnace set to 950
8/6/2012	12:24:51 PM	Helium valve closed
8/6/2012	12:24:51 PM	PH3 valve closed
8/6/2012	12:24:51 PM	Main Vac valve closed
8/6/2012	12:24:51 PM	Bypass valve closed
8/6/2012	12:24:51 PM	H2 valve opened
8/6/2012	12:24:51 PM	BCl3 valve opened
8/6/2012	12:24:51 PM	SiCl4 pre valve opened
8/6/2012	12:24:51 PM	SiCl4 post valve opened
8/6/2012	12:24:51 PM	Bubbler valve opened
8/6/2012	12:24:51 PM	Helium MFC set to  0.000000
8/6/2012	12:24:51 PM	H2 MFC set to  500.000000
8/6/2012	12:24:51 PM	BCl3 MFC set to  1.000000
8/6/2012	12:24:51 PM	PH3 MFC set to  0.000000
8/6/2012	12:24:51 PM	SiCl4 MFC set to  70.000000
8/6/2012	12:24:51 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	12:24:51 PM	Tube furnace set to 950
8/6/2012	12:44:51 PM	Helium valve closed
8/6/2012	12:44:51 PM	BCl3 valve closed
8/6/2012	12:44:51 PM	PH3 valve closed
8/6/2012	12:44:51 PM	SiCl4 pre valve closed
8/6/2012	12:44:51 PM	SiCl4 post valve closed
8/6/2012	12:44:51 PM	Main Vac valve closed
8/6/2012	12:44:51 PM	Bypass valve closed
8/6/2012	12:44:51 PM	H2 valve opened
8/6/2012	12:44:51 PM	Bubbler valve opened
8/6/2012	12:44:51 PM	Helium MFC set to  0.000000
8/6/2012	12:44:51 PM	H2 MFC set to  500.000000
8/6/2012	12:44:51 PM	BCl3 MFC set to  0.000000
8/6/2012	12:44:51 PM	PH3 MFC set to  0.000000
8/6/2012	12:44:51 PM	SiCl4 MFC set to  0.000000
8/6/2012	12:44:51 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	12:44:51 PM	Tube furnace set to 750
8/6/2012	12:49:51 PM	H2 valve closed
8/6/2012	12:49:51 PM	BCl3 valve closed
8/6/2012	12:49:51 PM	PH3 valve closed
8/6/2012	12:49:51 PM	SiCl4 pre valve closed
8/6/2012	12:49:51 PM	SiCl4 post valve closed
8/6/2012	12:49:51 PM	Main Vac valve closed
8/6/2012	12:49:51 PM	Bypass valve closed
8/6/2012	12:49:51 PM	Helium valve opened
8/6/2012	12:49:51 PM	Bubbler valve opened
8/6/2012	12:49:51 PM	Helium MFC set to  500.000000
8/6/2012	12:49:51 PM	H2 MFC set to  0.000000
8/6/2012	12:49:51 PM	BCl3 MFC set to  0.000000
8/6/2012	12:49:51 PM	PH3 MFC set to  0.000000
8/6/2012	12:49:51 PM	SiCl4 MFC set to  0.000000
8/6/2012	12:49:51 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	12:49:51 PM	Tube furnace set to 0
8/6/2012	1:09:51 PM	Helium valve closed
8/6/2012	1:09:51 PM	H2 valve closed
8/6/2012	1:09:51 PM	BCl3 valve closed
8/6/2012	1:09:51 PM	PH3 valve closed
8/6/2012	1:09:51 PM	SiCl4 pre valve closed
8/6/2012	1:09:51 PM	SiCl4 post valve closed
8/6/2012	1:09:51 PM	Main Vac valve closed
8/6/2012	1:09:51 PM	Bypass valve closed
8/6/2012	1:09:51 PM	Bubbler valve closed
8/6/2012	1:09:51 PM	Helium MFC set to  0.000000
8/6/2012	1:09:51 PM	H2 MFC set to  0.000000
8/6/2012	1:09:51 PM	BCl3 MFC set to  0.000000
8/6/2012	1:09:51 PM	PH3 MFC set to  0.000000
8/6/2012	1:09:51 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:09:51 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:09:52 PM	Tube furnace set to 0
8/6/2012	1:09:53 PM	Run finished at 1:09 PM
8/6/2012	1:13:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2012	1:13:32 PM	Recipe started at 1:13 PM
8/6/2012	1:13:32 PM	Helium valve closed
8/6/2012	1:13:32 PM	H2 valve closed
8/6/2012	1:13:32 PM	BCl3 valve closed
8/6/2012	1:13:32 PM	PH3 valve closed
8/6/2012	1:13:32 PM	SiCl4 pre valve closed
8/6/2012	1:13:32 PM	SiCl4 post valve closed
8/6/2012	1:13:32 PM	Main Vac valve closed
8/6/2012	1:13:32 PM	Bypass valve closed
8/6/2012	1:13:32 PM	Bubbler valve closed
8/6/2012	1:13:32 PM	Helium MFC set to  0.000000
8/6/2012	1:13:32 PM	H2 MFC set to  0.000000
8/6/2012	1:13:32 PM	BCl3 MFC set to  0.000000
8/6/2012	1:13:32 PM	PH3 MFC set to  0.000000
8/6/2012	1:13:32 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:13:32 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:13:33 PM	Tube furnace set to 0
8/6/2012	1:13:36 PM	H2 valve closed
8/6/2012	1:13:36 PM	BCl3 valve closed
8/6/2012	1:13:36 PM	PH3 valve closed
8/6/2012	1:13:36 PM	SiCl4 pre valve closed
8/6/2012	1:13:36 PM	SiCl4 post valve closed
8/6/2012	1:13:36 PM	Main Vac valve closed
8/6/2012	1:13:36 PM	Bypass valve closed
8/6/2012	1:13:36 PM	Bubbler valve closed
8/6/2012	1:13:36 PM	Helium valve opened
8/6/2012	1:13:36 PM	Helium MFC set to  500.000000
8/6/2012	1:13:36 PM	H2 MFC set to  0.000000
8/6/2012	1:13:36 PM	BCl3 MFC set to  0.000000
8/6/2012	1:13:36 PM	PH3 MFC set to  0.000000
8/6/2012	1:13:36 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:13:36 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:13:36 PM	Tube furnace set to 0
8/6/2012	1:13:36 PM	Helium valve closed
8/6/2012	1:13:36 PM	H2 valve closed
8/6/2012	1:13:36 PM	BCl3 valve closed
8/6/2012	1:13:36 PM	PH3 valve closed
8/6/2012	1:13:36 PM	SiCl4 pre valve closed
8/6/2012	1:13:36 PM	SiCl4 post valve closed
8/6/2012	1:13:36 PM	Main Vac valve closed
8/6/2012	1:13:36 PM	Bypass valve closed
8/6/2012	1:13:36 PM	Bubbler valve closed
8/6/2012	1:13:36 PM	Helium MFC set to  0.000000
8/6/2012	1:13:36 PM	H2 MFC set to  0.000000
8/6/2012	1:13:36 PM	BCl3 MFC set to  0.000000
8/6/2012	1:13:36 PM	PH3 MFC set to  0.000000
8/6/2012	1:13:36 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:13:36 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:13:36 PM	Tube furnace set to 0
8/6/2012	1:13:37 PM	Run finished at 1:13 PM
8/6/2012	1:13:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2012	1:17:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2012	1:17:49 PM	Recipe started at 1:17 PM
8/6/2012	1:17:49 PM	Helium valve closed
8/6/2012	1:17:49 PM	H2 valve closed
8/6/2012	1:17:49 PM	BCl3 valve closed
8/6/2012	1:17:49 PM	PH3 valve closed
8/6/2012	1:17:49 PM	SiCl4 pre valve closed
8/6/2012	1:17:49 PM	SiCl4 post valve closed
8/6/2012	1:17:49 PM	Main Vac valve closed
8/6/2012	1:17:49 PM	Bubbler valve closed
8/6/2012	1:17:49 PM	Bypass valve opened
8/6/2012	1:17:49 PM	Helium MFC set to  0.000000
8/6/2012	1:17:49 PM	H2 MFC set to  0.000000
8/6/2012	1:17:49 PM	BCl3 MFC set to  0.000000
8/6/2012	1:17:49 PM	PH3 MFC set to  0.000000
8/6/2012	1:17:49 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:17:49 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:17:49 PM	Tube furnace set to 0
8/6/2012	1:19:06 PM	Helium valve closed
8/6/2012	1:19:06 PM	H2 valve closed
8/6/2012	1:19:06 PM	BCl3 valve closed
8/6/2012	1:19:06 PM	PH3 valve closed
8/6/2012	1:19:06 PM	SiCl4 pre valve closed
8/6/2012	1:19:06 PM	SiCl4 post valve closed
8/6/2012	1:19:06 PM	Main Vac valve closed
8/6/2012	1:19:06 PM	Bubbler valve closed
8/6/2012	1:19:06 PM	Bypass valve opened
8/6/2012	1:19:06 PM	Helium MFC set to  0.000000
8/6/2012	1:19:06 PM	H2 MFC set to  0.000000
8/6/2012	1:19:06 PM	BCl3 MFC set to  0.000000
8/6/2012	1:19:06 PM	PH3 MFC set to  0.000000
8/6/2012	1:19:06 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:19:06 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:19:06 PM	Tube furnace set to 0
8/6/2012	1:20:06 PM	Helium valve closed
8/6/2012	1:20:06 PM	H2 valve closed
8/6/2012	1:20:06 PM	BCl3 valve closed
8/6/2012	1:20:07 PM	PH3 valve closed
8/6/2012	1:20:07 PM	SiCl4 pre valve closed
8/6/2012	1:20:07 PM	SiCl4 post valve closed
8/6/2012	1:20:07 PM	Bypass valve closed
8/6/2012	1:20:07 PM	Bubbler valve closed
8/6/2012	1:20:07 PM	Main Vac valve opened
8/6/2012	1:20:07 PM	Helium MFC set to  0.000000
8/6/2012	1:20:07 PM	H2 MFC set to  0.000000
8/6/2012	1:20:07 PM	BCl3 MFC set to  0.000000
8/6/2012	1:20:07 PM	PH3 MFC set to  0.000000
8/6/2012	1:20:07 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:20:07 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:20:07 PM	Tube furnace set to 0
8/6/2012	1:20:08 PM	Run finished at 1:20 PM
8/6/2012	1:20:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2012	1:39:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/6/2012	1:39:22 PM	Recipe started at 1:39 PM
8/6/2012	1:39:22 PM	Helium valve closed
8/6/2012	1:39:22 PM	H2 valve closed
8/6/2012	1:39:22 PM	BCl3 valve closed
8/6/2012	1:39:22 PM	PH3 valve closed
8/6/2012	1:39:22 PM	SiCl4 pre valve closed
8/6/2012	1:39:22 PM	SiCl4 post valve closed
8/6/2012	1:39:22 PM	Main Vac valve closed
8/6/2012	1:39:22 PM	Bubbler valve closed
8/6/2012	1:39:22 PM	Bypass valve opened
8/6/2012	1:39:23 PM	Helium MFC set to  0.000000
8/6/2012	1:39:23 PM	H2 MFC set to  0.000000
8/6/2012	1:39:23 PM	BCl3 MFC set to  0.000000
8/6/2012	1:39:23 PM	PH3 MFC set to  0.000000
8/6/2012	1:39:23 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:39:23 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:39:23 PM	Tube furnace set to 0
8/6/2012	1:39:23 PM	Helium valve closed
8/6/2012	1:39:23 PM	H2 valve closed
8/6/2012	1:39:23 PM	BCl3 valve closed
8/6/2012	1:39:23 PM	PH3 valve closed
8/6/2012	1:39:23 PM	SiCl4 pre valve closed
8/6/2012	1:39:23 PM	SiCl4 post valve closed
8/6/2012	1:39:23 PM	Main Vac valve closed
8/6/2012	1:39:23 PM	Bubbler valve closed
8/6/2012	1:39:23 PM	Bypass valve opened
8/6/2012	1:39:23 PM	Helium MFC set to  0.000000
8/6/2012	1:39:23 PM	H2 MFC set to  0.000000
8/6/2012	1:39:23 PM	BCl3 MFC set to  0.000000
8/6/2012	1:39:23 PM	PH3 MFC set to  0.000000
8/6/2012	1:39:23 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:39:23 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:39:23 PM	Tube furnace set to 0
8/6/2012	1:39:24 PM	Helium valve closed
8/6/2012	1:39:24 PM	H2 valve closed
8/6/2012	1:39:24 PM	BCl3 valve closed
8/6/2012	1:39:24 PM	PH3 valve closed
8/6/2012	1:39:24 PM	SiCl4 pre valve closed
8/6/2012	1:39:24 PM	SiCl4 post valve closed
8/6/2012	1:39:24 PM	Bypass valve closed
8/6/2012	1:39:24 PM	Bubbler valve closed
8/6/2012	1:39:24 PM	Main Vac valve opened
8/6/2012	1:39:24 PM	Helium MFC set to  0.000000
8/6/2012	1:39:24 PM	H2 MFC set to  0.000000
8/6/2012	1:39:24 PM	BCl3 MFC set to  0.000000
8/6/2012	1:39:24 PM	PH3 MFC set to  0.000000
8/6/2012	1:39:24 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:39:24 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:39:24 PM	Tube furnace set to 0
8/6/2012	1:39:24 PM	H2 valve closed
8/6/2012	1:39:24 PM	BCl3 valve closed
8/6/2012	1:39:24 PM	PH3 valve closed
8/6/2012	1:39:24 PM	SiCl4 pre valve closed
8/6/2012	1:39:24 PM	SiCl4 post valve closed
8/6/2012	1:39:24 PM	Bypass valve closed
8/6/2012	1:39:24 PM	Bubbler valve closed
8/6/2012	1:39:24 PM	Helium valve opened
8/6/2012	1:39:24 PM	Main Vac valve opened
8/6/2012	1:39:24 PM	Helium MFC set to  20.000000
8/6/2012	1:39:24 PM	H2 MFC set to  0.000000
8/6/2012	1:39:24 PM	BCl3 MFC set to  0.000000
8/6/2012	1:39:24 PM	PH3 MFC set to  0.000000
8/6/2012	1:39:24 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:39:24 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:39:24 PM	Tube furnace set to 0
8/6/2012	1:39:54 PM	Helium valve closed
8/6/2012	1:39:54 PM	H2 valve closed
8/6/2012	1:39:54 PM	BCl3 valve closed
8/6/2012	1:39:54 PM	PH3 valve closed
8/6/2012	1:39:54 PM	SiCl4 pre valve closed
8/6/2012	1:39:54 PM	SiCl4 post valve closed
8/6/2012	1:39:54 PM	Bypass valve closed
8/6/2012	1:39:54 PM	Bubbler valve closed
8/6/2012	1:39:54 PM	Main Vac valve opened
8/6/2012	1:39:54 PM	Helium MFC set to  0.000000
8/6/2012	1:39:54 PM	H2 MFC set to  0.000000
8/6/2012	1:39:54 PM	BCl3 MFC set to  0.000000
8/6/2012	1:39:54 PM	PH3 MFC set to  0.000000
8/6/2012	1:39:54 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:39:54 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:39:55 PM	Tube furnace set to 0
8/6/2012	1:40:25 PM	H2 valve closed
8/6/2012	1:40:25 PM	BCl3 valve closed
8/6/2012	1:40:25 PM	PH3 valve closed
8/6/2012	1:40:25 PM	SiCl4 pre valve closed
8/6/2012	1:40:25 PM	SiCl4 post valve closed
8/6/2012	1:40:25 PM	Bypass valve closed
8/6/2012	1:40:25 PM	Bubbler valve closed
8/6/2012	1:40:25 PM	Helium valve opened
8/6/2012	1:40:25 PM	Main Vac valve opened
8/6/2012	1:40:25 PM	Helium MFC set to  20.000000
8/6/2012	1:40:25 PM	H2 MFC set to  0.000000
8/6/2012	1:40:25 PM	BCl3 MFC set to  0.000000
8/6/2012	1:40:25 PM	PH3 MFC set to  0.000000
8/6/2012	1:40:25 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:40:25 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:40:25 PM	Tube furnace set to 0
8/6/2012	1:40:55 PM	Helium valve closed
8/6/2012	1:40:55 PM	H2 valve closed
8/6/2012	1:40:55 PM	BCl3 valve closed
8/6/2012	1:40:55 PM	PH3 valve closed
8/6/2012	1:40:55 PM	SiCl4 pre valve closed
8/6/2012	1:40:55 PM	SiCl4 post valve closed
8/6/2012	1:40:55 PM	Bypass valve closed
8/6/2012	1:40:55 PM	Bubbler valve closed
8/6/2012	1:40:55 PM	Main Vac valve opened
8/6/2012	1:40:55 PM	Helium MFC set to  0.000000
8/6/2012	1:40:55 PM	H2 MFC set to  0.000000
8/6/2012	1:40:55 PM	BCl3 MFC set to  0.000000
8/6/2012	1:40:55 PM	PH3 MFC set to  0.000000
8/6/2012	1:40:55 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:40:55 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:40:55 PM	Tube furnace set to 0
8/6/2012	1:41:25 PM	H2 valve closed
8/6/2012	1:41:25 PM	BCl3 valve closed
8/6/2012	1:41:25 PM	PH3 valve closed
8/6/2012	1:41:25 PM	SiCl4 pre valve closed
8/6/2012	1:41:25 PM	SiCl4 post valve closed
8/6/2012	1:41:25 PM	Bypass valve closed
8/6/2012	1:41:25 PM	Bubbler valve closed
8/6/2012	1:41:25 PM	Helium valve opened
8/6/2012	1:41:25 PM	Main Vac valve opened
8/6/2012	1:41:25 PM	Helium MFC set to  20.000000
8/6/2012	1:41:25 PM	H2 MFC set to  0.000000
8/6/2012	1:41:25 PM	BCl3 MFC set to  0.000000
8/6/2012	1:41:25 PM	PH3 MFC set to  0.000000
8/6/2012	1:41:25 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:41:25 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:41:25 PM	Tube furnace set to 0
8/6/2012	1:41:55 PM	Helium valve closed
8/6/2012	1:41:55 PM	H2 valve closed
8/6/2012	1:41:55 PM	BCl3 valve closed
8/6/2012	1:41:55 PM	PH3 valve closed
8/6/2012	1:41:55 PM	SiCl4 pre valve closed
8/6/2012	1:41:55 PM	SiCl4 post valve closed
8/6/2012	1:41:55 PM	Bypass valve closed
8/6/2012	1:41:55 PM	Bubbler valve closed
8/6/2012	1:41:55 PM	Main Vac valve opened
8/6/2012	1:41:55 PM	Helium MFC set to  0.000000
8/6/2012	1:41:55 PM	H2 MFC set to  0.000000
8/6/2012	1:41:55 PM	BCl3 MFC set to  0.000000
8/6/2012	1:41:55 PM	PH3 MFC set to  0.000000
8/6/2012	1:41:55 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:41:55 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:41:56 PM	Tube furnace set to 0
8/6/2012	1:42:26 PM	H2 valve closed
8/6/2012	1:42:26 PM	BCl3 valve closed
8/6/2012	1:42:26 PM	PH3 valve closed
8/6/2012	1:42:26 PM	SiCl4 pre valve closed
8/6/2012	1:42:26 PM	SiCl4 post valve closed
8/6/2012	1:42:26 PM	Bypass valve closed
8/6/2012	1:42:26 PM	Bubbler valve closed
8/6/2012	1:42:26 PM	Helium valve opened
8/6/2012	1:42:26 PM	Main Vac valve opened
8/6/2012	1:42:26 PM	Helium MFC set to  20.000000
8/6/2012	1:42:26 PM	H2 MFC set to  0.000000
8/6/2012	1:42:26 PM	BCl3 MFC set to  0.000000
8/6/2012	1:42:26 PM	PH3 MFC set to  0.000000
8/6/2012	1:42:26 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:42:26 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:42:26 PM	Tube furnace set to 0
8/6/2012	1:42:56 PM	Helium valve closed
8/6/2012	1:42:56 PM	H2 valve closed
8/6/2012	1:42:56 PM	BCl3 valve closed
8/6/2012	1:42:56 PM	PH3 valve closed
8/6/2012	1:42:56 PM	SiCl4 pre valve closed
8/6/2012	1:42:56 PM	SiCl4 post valve closed
8/6/2012	1:42:56 PM	Bypass valve closed
8/6/2012	1:42:56 PM	Bubbler valve closed
8/6/2012	1:42:56 PM	Main Vac valve opened
8/6/2012	1:42:56 PM	Helium MFC set to  0.000000
8/6/2012	1:42:56 PM	H2 MFC set to  0.000000
8/6/2012	1:42:56 PM	BCl3 MFC set to  0.000000
8/6/2012	1:42:56 PM	PH3 MFC set to  0.000000
8/6/2012	1:42:56 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:42:56 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:42:56 PM	Tube furnace set to 0
8/6/2012	1:43:26 PM	H2 valve closed
8/6/2012	1:43:26 PM	BCl3 valve closed
8/6/2012	1:43:26 PM	PH3 valve closed
8/6/2012	1:43:26 PM	SiCl4 pre valve closed
8/6/2012	1:43:26 PM	SiCl4 post valve closed
8/6/2012	1:43:26 PM	Bypass valve closed
8/6/2012	1:43:26 PM	Bubbler valve closed
8/6/2012	1:43:26 PM	Helium valve opened
8/6/2012	1:43:26 PM	Main Vac valve opened
8/6/2012	1:43:26 PM	Helium MFC set to  20.000000
8/6/2012	1:43:26 PM	H2 MFC set to  0.000000
8/6/2012	1:43:26 PM	BCl3 MFC set to  0.000000
8/6/2012	1:43:26 PM	PH3 MFC set to  0.000000
8/6/2012	1:43:26 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:43:26 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:43:26 PM	Tube furnace set to 0
8/6/2012	1:43:56 PM	Helium valve closed
8/6/2012	1:43:56 PM	H2 valve closed
8/6/2012	1:43:56 PM	BCl3 valve closed
8/6/2012	1:43:56 PM	PH3 valve closed
8/6/2012	1:43:56 PM	SiCl4 pre valve closed
8/6/2012	1:43:56 PM	SiCl4 post valve closed
8/6/2012	1:43:56 PM	Bypass valve closed
8/6/2012	1:43:56 PM	Bubbler valve closed
8/6/2012	1:43:56 PM	Main Vac valve opened
8/6/2012	1:43:56 PM	Helium MFC set to  0.000000
8/6/2012	1:43:56 PM	H2 MFC set to  0.000000
8/6/2012	1:43:56 PM	BCl3 MFC set to  0.000000
8/6/2012	1:43:56 PM	PH3 MFC set to  0.000000
8/6/2012	1:43:56 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:43:56 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:43:57 PM	Tube furnace set to 0
8/6/2012	1:44:27 PM	H2 valve closed
8/6/2012	1:44:27 PM	BCl3 valve closed
8/6/2012	1:44:27 PM	PH3 valve closed
8/6/2012	1:44:27 PM	SiCl4 pre valve closed
8/6/2012	1:44:27 PM	SiCl4 post valve closed
8/6/2012	1:44:27 PM	Bypass valve closed
8/6/2012	1:44:27 PM	Bubbler valve closed
8/6/2012	1:44:27 PM	Helium valve opened
8/6/2012	1:44:27 PM	Main Vac valve opened
8/6/2012	1:44:27 PM	Helium MFC set to  20.000000
8/6/2012	1:44:27 PM	H2 MFC set to  0.000000
8/6/2012	1:44:27 PM	BCl3 MFC set to  0.000000
8/6/2012	1:44:27 PM	PH3 MFC set to  0.000000
8/6/2012	1:44:27 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:44:27 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:44:27 PM	Tube furnace set to 0
8/6/2012	1:44:57 PM	Helium valve closed
8/6/2012	1:44:57 PM	H2 valve closed
8/6/2012	1:44:57 PM	BCl3 valve closed
8/6/2012	1:44:57 PM	PH3 valve closed
8/6/2012	1:44:57 PM	SiCl4 pre valve closed
8/6/2012	1:44:57 PM	SiCl4 post valve closed
8/6/2012	1:44:57 PM	Bypass valve closed
8/6/2012	1:44:57 PM	Bubbler valve closed
8/6/2012	1:44:57 PM	Main Vac valve opened
8/6/2012	1:44:57 PM	Helium MFC set to  0.000000
8/6/2012	1:44:57 PM	H2 MFC set to  0.000000
8/6/2012	1:44:57 PM	BCl3 MFC set to  0.000000
8/6/2012	1:44:57 PM	PH3 MFC set to  0.000000
8/6/2012	1:44:57 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:44:57 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:44:57 PM	Tube furnace set to 0
8/6/2012	1:45:27 PM	H2 valve closed
8/6/2012	1:45:27 PM	BCl3 valve closed
8/6/2012	1:45:27 PM	PH3 valve closed
8/6/2012	1:45:27 PM	SiCl4 pre valve closed
8/6/2012	1:45:27 PM	SiCl4 post valve closed
8/6/2012	1:45:27 PM	Bypass valve closed
8/6/2012	1:45:27 PM	Bubbler valve closed
8/6/2012	1:45:27 PM	Helium valve opened
8/6/2012	1:45:27 PM	Main Vac valve opened
8/6/2012	1:45:27 PM	Helium MFC set to  20.000000
8/6/2012	1:45:27 PM	H2 MFC set to  0.000000
8/6/2012	1:45:27 PM	BCl3 MFC set to  0.000000
8/6/2012	1:45:27 PM	PH3 MFC set to  0.000000
8/6/2012	1:45:27 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:45:27 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:45:27 PM	Tube furnace set to 0
8/6/2012	1:45:57 PM	Helium valve closed
8/6/2012	1:45:57 PM	H2 valve closed
8/6/2012	1:45:57 PM	BCl3 valve closed
8/6/2012	1:45:57 PM	PH3 valve closed
8/6/2012	1:45:57 PM	SiCl4 pre valve closed
8/6/2012	1:45:57 PM	SiCl4 post valve closed
8/6/2012	1:45:57 PM	Bypass valve closed
8/6/2012	1:45:57 PM	Bubbler valve closed
8/6/2012	1:45:57 PM	Main Vac valve opened
8/6/2012	1:45:57 PM	Helium MFC set to  0.000000
8/6/2012	1:45:57 PM	H2 MFC set to  0.000000
8/6/2012	1:45:57 PM	BCl3 MFC set to  0.000000
8/6/2012	1:45:57 PM	PH3 MFC set to  0.000000
8/6/2012	1:45:57 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:45:57 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:45:57 PM	Tube furnace set to 0
8/6/2012	1:46:27 PM	H2 valve closed
8/6/2012	1:46:27 PM	BCl3 valve closed
8/6/2012	1:46:27 PM	PH3 valve closed
8/6/2012	1:46:27 PM	SiCl4 pre valve closed
8/6/2012	1:46:28 PM	SiCl4 post valve closed
8/6/2012	1:46:28 PM	Bypass valve closed
8/6/2012	1:46:28 PM	Bubbler valve closed
8/6/2012	1:46:28 PM	Helium valve opened
8/6/2012	1:46:28 PM	Main Vac valve opened
8/6/2012	1:46:28 PM	Helium MFC set to  20.000000
8/6/2012	1:46:28 PM	H2 MFC set to  0.000000
8/6/2012	1:46:28 PM	BCl3 MFC set to  0.000000
8/6/2012	1:46:28 PM	PH3 MFC set to  0.000000
8/6/2012	1:46:28 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:46:28 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:46:28 PM	Tube furnace set to 0
8/6/2012	1:46:58 PM	Helium valve closed
8/6/2012	1:46:58 PM	H2 valve closed
8/6/2012	1:46:58 PM	BCl3 valve closed
8/6/2012	1:46:58 PM	PH3 valve closed
8/6/2012	1:46:58 PM	SiCl4 pre valve closed
8/6/2012	1:46:58 PM	SiCl4 post valve closed
8/6/2012	1:46:58 PM	Bypass valve closed
8/6/2012	1:46:58 PM	Bubbler valve closed
8/6/2012	1:46:58 PM	Main Vac valve opened
8/6/2012	1:46:58 PM	Helium MFC set to  0.000000
8/6/2012	1:46:58 PM	H2 MFC set to  0.000000
8/6/2012	1:46:58 PM	BCl3 MFC set to  0.000000
8/6/2012	1:46:58 PM	PH3 MFC set to  0.000000
8/6/2012	1:46:58 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:46:58 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:46:58 PM	Tube furnace set to 0
8/6/2012	1:47:28 PM	H2 valve closed
8/6/2012	1:47:28 PM	BCl3 valve closed
8/6/2012	1:47:28 PM	PH3 valve closed
8/6/2012	1:47:28 PM	SiCl4 pre valve closed
8/6/2012	1:47:28 PM	SiCl4 post valve closed
8/6/2012	1:47:28 PM	Bypass valve closed
8/6/2012	1:47:28 PM	Bubbler valve closed
8/6/2012	1:47:28 PM	Helium valve opened
8/6/2012	1:47:28 PM	Main Vac valve opened
8/6/2012	1:47:28 PM	Helium MFC set to  20.000000
8/6/2012	1:47:28 PM	H2 MFC set to  0.000000
8/6/2012	1:47:28 PM	BCl3 MFC set to  0.000000
8/6/2012	1:47:28 PM	PH3 MFC set to  0.000000
8/6/2012	1:47:28 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:47:28 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:47:28 PM	Tube furnace set to 0
8/6/2012	1:47:58 PM	Helium valve closed
8/6/2012	1:47:58 PM	H2 valve closed
8/6/2012	1:47:58 PM	BCl3 valve closed
8/6/2012	1:47:58 PM	PH3 valve closed
8/6/2012	1:47:58 PM	SiCl4 pre valve closed
8/6/2012	1:47:58 PM	SiCl4 post valve closed
8/6/2012	1:47:58 PM	Bypass valve closed
8/6/2012	1:47:58 PM	Bubbler valve closed
8/6/2012	1:47:58 PM	Main Vac valve opened
8/6/2012	1:47:58 PM	Helium MFC set to  0.000000
8/6/2012	1:47:58 PM	H2 MFC set to  0.000000
8/6/2012	1:47:58 PM	BCl3 MFC set to  0.000000
8/6/2012	1:47:58 PM	PH3 MFC set to  0.000000
8/6/2012	1:47:58 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:47:58 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:47:58 PM	Tube furnace set to 0
8/6/2012	1:48:28 PM	H2 valve closed
8/6/2012	1:48:28 PM	BCl3 valve closed
8/6/2012	1:48:28 PM	PH3 valve closed
8/6/2012	1:48:28 PM	SiCl4 pre valve closed
8/6/2012	1:48:28 PM	SiCl4 post valve closed
8/6/2012	1:48:28 PM	Bypass valve closed
8/6/2012	1:48:28 PM	Bubbler valve closed
8/6/2012	1:48:28 PM	Helium valve opened
8/6/2012	1:48:28 PM	Main Vac valve opened
8/6/2012	1:48:28 PM	Helium MFC set to  20.000000
8/6/2012	1:48:28 PM	H2 MFC set to  0.000000
8/6/2012	1:48:28 PM	BCl3 MFC set to  0.000000
8/6/2012	1:48:28 PM	PH3 MFC set to  0.000000
8/6/2012	1:48:28 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:48:28 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:48:29 PM	Tube furnace set to 0
8/6/2012	1:48:59 PM	Helium valve closed
8/6/2012	1:48:59 PM	H2 valve closed
8/6/2012	1:48:59 PM	BCl3 valve closed
8/6/2012	1:48:59 PM	PH3 valve closed
8/6/2012	1:48:59 PM	SiCl4 pre valve closed
8/6/2012	1:48:59 PM	SiCl4 post valve closed
8/6/2012	1:48:59 PM	Bypass valve closed
8/6/2012	1:48:59 PM	Bubbler valve closed
8/6/2012	1:48:59 PM	Main Vac valve opened
8/6/2012	1:48:59 PM	Helium MFC set to  0.000000
8/6/2012	1:48:59 PM	H2 MFC set to  0.000000
8/6/2012	1:48:59 PM	BCl3 MFC set to  0.000000
8/6/2012	1:48:59 PM	PH3 MFC set to  0.000000
8/6/2012	1:48:59 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:48:59 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:48:59 PM	Tube furnace set to 0
8/6/2012	1:49:00 PM	Run finished at 1:49 PM
8/6/2012	1:49:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/6/2012	1:51:21 PM	Recipe started at 1:51 PM
8/6/2012	1:51:21 PM	Helium valve closed
8/6/2012	1:51:21 PM	H2 valve closed
8/6/2012	1:51:21 PM	BCl3 valve closed
8/6/2012	1:51:21 PM	PH3 valve closed
8/6/2012	1:51:21 PM	SiCl4 pre valve closed
8/6/2012	1:51:21 PM	SiCl4 post valve closed
8/6/2012	1:51:21 PM	Main Vac valve closed
8/6/2012	1:51:21 PM	Bypass valve closed
8/6/2012	1:51:21 PM	Bubbler valve closed
8/6/2012	1:51:21 PM	Helium MFC set to  0.000000
8/6/2012	1:51:21 PM	H2 MFC set to  0.000000
8/6/2012	1:51:21 PM	BCl3 MFC set to  0.000000
8/6/2012	1:51:21 PM	PH3 MFC set to  0.000000
8/6/2012	1:51:21 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:51:21 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:51:22 PM	Tube furnace set to 0
8/6/2012	1:51:25 PM	Helium valve closed
8/6/2012	1:51:25 PM	BCl3 valve closed
8/6/2012	1:51:25 PM	PH3 valve closed
8/6/2012	1:51:25 PM	SiCl4 pre valve closed
8/6/2012	1:51:25 PM	SiCl4 post valve closed
8/6/2012	1:51:25 PM	Main Vac valve closed
8/6/2012	1:51:25 PM	Bypass valve closed
8/6/2012	1:51:25 PM	Bubbler valve closed
8/6/2012	1:51:25 PM	H2 valve opened
8/6/2012	1:51:25 PM	Helium MFC set to  0.000000
8/6/2012	1:51:25 PM	H2 MFC set to  500.000000
8/6/2012	1:51:25 PM	BCl3 MFC set to  0.000000
8/6/2012	1:51:25 PM	PH3 MFC set to  0.000000
8/6/2012	1:51:25 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:51:25 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:51:25 PM	Tube furnace set to 0
8/6/2012	1:52:38 PM	Helium valve closed
8/6/2012	1:52:38 PM	BCl3 valve closed
8/6/2012	1:52:38 PM	PH3 valve closed
8/6/2012	1:52:38 PM	SiCl4 pre valve closed
8/6/2012	1:52:38 PM	SiCl4 post valve closed
8/6/2012	1:52:38 PM	Main Vac valve closed
8/6/2012	1:52:38 PM	Bypass valve closed
8/6/2012	1:52:38 PM	H2 valve opened
8/6/2012	1:52:38 PM	Bubbler valve opened
8/6/2012	1:52:38 PM	Helium MFC set to  0.000000
8/6/2012	1:52:38 PM	H2 MFC set to  500.000000
8/6/2012	1:52:38 PM	BCl3 MFC set to  0.000000
8/6/2012	1:52:38 PM	PH3 MFC set to  0.000000
8/6/2012	1:52:38 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:52:38 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:52:38 PM	Tube furnace set to 0
8/6/2012	1:52:39 PM	Helium valve closed
8/6/2012	1:52:39 PM	BCl3 valve closed
8/6/2012	1:52:39 PM	PH3 valve closed
8/6/2012	1:52:39 PM	SiCl4 pre valve closed
8/6/2012	1:52:39 PM	SiCl4 post valve closed
8/6/2012	1:52:39 PM	Main Vac valve closed
8/6/2012	1:52:39 PM	Bypass valve closed
8/6/2012	1:52:39 PM	H2 valve opened
8/6/2012	1:52:39 PM	Bubbler valve opened
8/6/2012	1:52:39 PM	Helium MFC set to  0.000000
8/6/2012	1:52:39 PM	H2 MFC set to  500.000000
8/6/2012	1:52:39 PM	BCl3 MFC set to  0.000000
8/6/2012	1:52:39 PM	PH3 MFC set to  0.000000
8/6/2012	1:52:39 PM	SiCl4 MFC set to  0.000000
8/6/2012	1:52:39 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	1:52:40 PM	Tube furnace set to 950
8/6/2012	2:12:40 PM	Helium valve closed
8/6/2012	2:12:40 PM	PH3 valve closed
8/6/2012	2:12:40 PM	Main Vac valve closed
8/6/2012	2:12:40 PM	Bypass valve closed
8/6/2012	2:12:40 PM	H2 valve opened
8/6/2012	2:12:40 PM	BCl3 valve opened
8/6/2012	2:12:40 PM	SiCl4 pre valve opened
8/6/2012	2:12:40 PM	SiCl4 post valve opened
8/6/2012	2:12:40 PM	Bubbler valve opened
8/6/2012	2:12:40 PM	Helium MFC set to  0.000000
8/6/2012	2:12:40 PM	H2 MFC set to  500.000000
8/6/2012	2:12:40 PM	BCl3 MFC set to  1.000000
8/6/2012	2:12:40 PM	PH3 MFC set to  0.000000
8/6/2012	2:12:40 PM	SiCl4 MFC set to  80.000000
8/6/2012	2:12:40 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	2:12:40 PM	Tube furnace set to 950
8/6/2012	2:32:40 PM	Helium valve closed
8/6/2012	2:32:40 PM	BCl3 valve closed
8/6/2012	2:32:40 PM	PH3 valve closed
8/6/2012	2:32:40 PM	SiCl4 pre valve closed
8/6/2012	2:32:40 PM	SiCl4 post valve closed
8/6/2012	2:32:40 PM	Main Vac valve closed
8/6/2012	2:32:40 PM	Bypass valve closed
8/6/2012	2:32:40 PM	H2 valve opened
8/6/2012	2:32:40 PM	Bubbler valve opened
8/6/2012	2:32:40 PM	Helium MFC set to  0.000000
8/6/2012	2:32:40 PM	H2 MFC set to  500.000000
8/6/2012	2:32:40 PM	BCl3 MFC set to  0.000000
8/6/2012	2:32:40 PM	PH3 MFC set to  0.000000
8/6/2012	2:32:40 PM	SiCl4 MFC set to  0.000000
8/6/2012	2:32:40 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	2:32:40 PM	Tube furnace set to 750
8/6/2012	2:37:40 PM	H2 valve closed
8/6/2012	2:37:40 PM	BCl3 valve closed
8/6/2012	2:37:40 PM	PH3 valve closed
8/6/2012	2:37:40 PM	SiCl4 pre valve closed
8/6/2012	2:37:40 PM	SiCl4 post valve closed
8/6/2012	2:37:40 PM	Main Vac valve closed
8/6/2012	2:37:40 PM	Bypass valve closed
8/6/2012	2:37:40 PM	Helium valve opened
8/6/2012	2:37:40 PM	Bubbler valve opened
8/6/2012	2:37:40 PM	Helium MFC set to  500.000000
8/6/2012	2:37:40 PM	H2 MFC set to  0.000000
8/6/2012	2:37:40 PM	BCl3 MFC set to  0.000000
8/6/2012	2:37:40 PM	PH3 MFC set to  0.000000
8/6/2012	2:37:40 PM	SiCl4 MFC set to  0.000000
8/6/2012	2:37:40 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	2:37:40 PM	Tube furnace set to 0
8/6/2012	2:57:40 PM	Helium valve closed
8/6/2012	2:57:40 PM	H2 valve closed
8/6/2012	2:57:40 PM	BCl3 valve closed
8/6/2012	2:57:40 PM	PH3 valve closed
8/6/2012	2:57:40 PM	SiCl4 pre valve closed
8/6/2012	2:57:40 PM	SiCl4 post valve closed
8/6/2012	2:57:40 PM	Main Vac valve closed
8/6/2012	2:57:40 PM	Bypass valve closed
8/6/2012	2:57:40 PM	Bubbler valve closed
8/6/2012	2:57:40 PM	Helium MFC set to  0.000000
8/6/2012	2:57:40 PM	H2 MFC set to  0.000000
8/6/2012	2:57:40 PM	BCl3 MFC set to  0.000000
8/6/2012	2:57:40 PM	PH3 MFC set to  0.000000
8/6/2012	2:57:40 PM	SiCl4 MFC set to  0.000000
8/6/2012	2:57:40 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	2:57:41 PM	Tube furnace set to 0
8/6/2012	2:57:42 PM	Run finished at 2:57 PM
8/6/2012	2:58:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2012	2:58:43 PM	Recipe started at 2:58 PM
8/6/2012	2:58:43 PM	Helium valve closed
8/6/2012	2:58:43 PM	H2 valve closed
8/6/2012	2:58:43 PM	BCl3 valve closed
8/6/2012	2:58:43 PM	PH3 valve closed
8/6/2012	2:58:43 PM	SiCl4 pre valve closed
8/6/2012	2:58:43 PM	SiCl4 post valve closed
8/6/2012	2:58:43 PM	Main Vac valve closed
8/6/2012	2:58:43 PM	Bypass valve closed
8/6/2012	2:58:43 PM	Bubbler valve closed
8/6/2012	2:58:43 PM	Helium MFC set to  0.000000
8/6/2012	2:58:43 PM	H2 MFC set to  0.000000
8/6/2012	2:58:43 PM	BCl3 MFC set to  0.000000
8/6/2012	2:58:43 PM	PH3 MFC set to  0.000000
8/6/2012	2:58:43 PM	SiCl4 MFC set to  0.000000
8/6/2012	2:58:43 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	2:58:44 PM	Tube furnace set to 0
8/6/2012	2:58:47 PM	H2 valve closed
8/6/2012	2:58:47 PM	BCl3 valve closed
8/6/2012	2:58:47 PM	PH3 valve closed
8/6/2012	2:58:47 PM	SiCl4 pre valve closed
8/6/2012	2:58:47 PM	SiCl4 post valve closed
8/6/2012	2:58:47 PM	Main Vac valve closed
8/6/2012	2:58:47 PM	Bypass valve closed
8/6/2012	2:58:47 PM	Bubbler valve closed
8/6/2012	2:58:47 PM	Helium valve opened
8/6/2012	2:58:47 PM	Helium MFC set to  500.000000
8/6/2012	2:58:47 PM	H2 MFC set to  0.000000
8/6/2012	2:58:47 PM	BCl3 MFC set to  0.000000
8/6/2012	2:58:47 PM	PH3 MFC set to  0.000000
8/6/2012	2:58:47 PM	SiCl4 MFC set to  0.000000
8/6/2012	2:58:47 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	2:58:47 PM	Tube furnace set to 0
8/6/2012	2:58:47 PM	Helium valve closed
8/6/2012	2:58:47 PM	H2 valve closed
8/6/2012	2:58:47 PM	BCl3 valve closed
8/6/2012	2:58:47 PM	PH3 valve closed
8/6/2012	2:58:47 PM	SiCl4 pre valve closed
8/6/2012	2:58:47 PM	SiCl4 post valve closed
8/6/2012	2:58:47 PM	Main Vac valve closed
8/6/2012	2:58:47 PM	Bypass valve closed
8/6/2012	2:58:47 PM	Bubbler valve closed
8/6/2012	2:58:47 PM	Helium MFC set to  0.000000
8/6/2012	2:58:47 PM	H2 MFC set to  0.000000
8/6/2012	2:58:47 PM	BCl3 MFC set to  0.000000
8/6/2012	2:58:47 PM	PH3 MFC set to  0.000000
8/6/2012	2:58:47 PM	SiCl4 MFC set to  0.000000
8/6/2012	2:58:47 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	2:58:47 PM	Tube furnace set to 0
8/6/2012	2:58:48 PM	Run finished at 2:58 PM
8/6/2012	2:58:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/6/2012	3:01:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/6/2012	3:01:11 PM	Recipe started at 3:01 PM
8/6/2012	3:01:11 PM	Helium valve closed
8/6/2012	3:01:11 PM	H2 valve closed
8/6/2012	3:01:11 PM	BCl3 valve closed
8/6/2012	3:01:12 PM	PH3 valve closed
8/6/2012	3:01:12 PM	SiCl4 pre valve closed
8/6/2012	3:01:12 PM	SiCl4 post valve closed
8/6/2012	3:01:12 PM	Main Vac valve closed
8/6/2012	3:01:12 PM	Bubbler valve closed
8/6/2012	3:01:12 PM	Bypass valve opened
8/6/2012	3:01:12 PM	Helium MFC set to  0.000000
8/6/2012	3:01:12 PM	H2 MFC set to  0.000000
8/6/2012	3:01:12 PM	BCl3 MFC set to  0.000000
8/6/2012	3:01:12 PM	PH3 MFC set to  0.000000
8/6/2012	3:01:12 PM	SiCl4 MFC set to  0.000000
8/6/2012	3:01:12 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	3:01:12 PM	Tube furnace set to 0
8/6/2012	3:02:23 PM	Helium valve closed
8/6/2012	3:02:23 PM	H2 valve closed
8/6/2012	3:02:23 PM	BCl3 valve closed
8/6/2012	3:02:23 PM	PH3 valve closed
8/6/2012	3:02:23 PM	SiCl4 pre valve closed
8/6/2012	3:02:23 PM	SiCl4 post valve closed
8/6/2012	3:02:23 PM	Main Vac valve closed
8/6/2012	3:02:23 PM	Bubbler valve closed
8/6/2012	3:02:23 PM	Bypass valve opened
8/6/2012	3:02:24 PM	Helium MFC set to  0.000000
8/6/2012	3:02:24 PM	H2 MFC set to  0.000000
8/6/2012	3:02:24 PM	BCl3 MFC set to  0.000000
8/6/2012	3:02:24 PM	PH3 MFC set to  0.000000
8/6/2012	3:02:24 PM	SiCl4 MFC set to  0.000000
8/6/2012	3:02:24 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	3:02:24 PM	Tube furnace set to 0
8/6/2012	3:03:24 PM	Helium valve closed
8/6/2012	3:03:24 PM	H2 valve closed
8/6/2012	3:03:24 PM	BCl3 valve closed
8/6/2012	3:03:24 PM	PH3 valve closed
8/6/2012	3:03:24 PM	SiCl4 pre valve closed
8/6/2012	3:03:24 PM	SiCl4 post valve closed
8/6/2012	3:03:24 PM	Bypass valve closed
8/6/2012	3:03:24 PM	Bubbler valve closed
8/6/2012	3:03:24 PM	Main Vac valve opened
8/6/2012	3:03:24 PM	Helium MFC set to  0.000000
8/6/2012	3:03:24 PM	H2 MFC set to  0.000000
8/6/2012	3:03:24 PM	BCl3 MFC set to  0.000000
8/6/2012	3:03:24 PM	PH3 MFC set to  0.000000
8/6/2012	3:03:24 PM	SiCl4 MFC set to  0.000000
8/6/2012	3:03:24 PM	Bypass solenoid MFC set to  0.000000
8/6/2012	3:03:24 PM	Tube furnace set to 0
8/6/2012	3:03:25 PM	Run finished at 3:03 PM
8/6/2012	3:03:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
